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Non-contact type sucker

A non-contact suction cup technology, which is applied in the manufacture of electrical components, semiconductor/solid-state devices, circuits, etc., can solve the problems of rising manufacturing costs, high processing difficulty, and increased non-contact suction cups, and achieves simple structure and low production cost. low effect

Inactive Publication Date: 2012-09-26
CHROMA ATE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, this structure also has many disadvantages. Firstly, the air intake from above the main disc body will greatly increase the thickness of the non-contact suction cup, so the selection of the interface is easily limited, and the use of surrounding space is also limited. , due to the need for drilling, the air jet parts are more difficult to process, and the manufacturing cost will increase accordingly

Method used

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Examples

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Embodiment Construction

[0048] The invention relates to a suction cup, especially a non-contact non-contact suction cup. A preferred embodiment is listed below to illustrate the present invention, but those skilled in the art know that this is only an example, not intended to limit the invention itself. The content of this preferred embodiment is described in detail as follows.

[0049] see figure 1 , figure 2 and image 3 , figure 1 It is an inverted exploded view of the non-contact suction cup according to the first embodiment of the present invention, figure 2 for along figure 1 A cutaway view of the A-A tangent, image 3 It is a schematic diagram of the air outlet of the non-contact sucker of the first embodiment. The non-contact suction cup 100 includes an air guiding seat 11 and an air disturbing seat 12 .

[0050] The air guide seat 11 has an adsorption surface 111, a tapered groove 112 and an air inlet channel 113, the adsorption surface 111 is located below the air guide seat 11, a...

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PUM

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Abstract

A non-contact type sucker comprises a gas conductive seat and a gas scrambling seat. The gas conductive seat possesses an adsorption surface, a tapered slot and a gas inlet channel, wherein the adsorption surface is positioned below the gas conductive seat, the tapered slot becomes tapered from the adsorption surface to the interior of the gas conductive seat, and the gas inlet channel is communicated with the concentration slot. The gas scrambling seat is arranged in the tapered slot which is communicated with one chamber of the gas channel, at least one edge of the gas scrambling seat has a gas outlet gap with the tapered slot. When external gas enters the gas chamber from the gas channel, the external gas is ejected out from the gas outlet gap along a wall surface of the tapered slot.

Description

technical field [0001] The invention relates to a sucker structure, in particular to a non-contact sucker. Background technique [0002] Since semiconductor technology and many manufacturing industries need to move processing objects during production, how to absorb and transport processing objects has become an important issue. In the industry, the more mainstream method is to use suction cups to absorb processing objects. [0003] In the past, the simplest suction cup was used to absorb the processing object in the way of suction. The principle of this method is simple. However, during the adsorption process, the suction cup will directly contact the processing object. For some relatively fragile processing objects such as wafers and solar energy plate, it is easy to cause the adsorbed processing object to be damaged due to bending or collision. [0004] In order to improve the shortcomings of the contact sucker, the existing technology began to develop a non-contact suck...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/683
Inventor 王瑞贤许义胜
Owner CHROMA ATE