Measuring device and measuring method for flatness of tabletop of platform
A measuring device, flatness technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of error-prone, cumbersome and so on
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[0029] In order to further illustrate the principle and structure of the present invention, preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
[0030] Such as figure 2 As shown, the embodiment of the present invention proposes a flatness measuring device for a platform table, which includes an X Y two-dimensional motion platform system 4, a Z-axis motion system 1 and a Z-axis processing head 2, and a set of measurement devices is arranged on the Z-axis processing head 2. Head 3, the measuring head 3 includes a measuring rod 31, a fixed seat 32 and an inductor 33, the inductor 33 is fixed on the fixed seat 32, the measuring rod 31 is arranged in the fixed seat 32 and can move up and down freely. During the operation, the fixed seat 32 of the measuring head 3 is connected with the Z-axis processing head 2. When the measuring head 3 moves downward, after the measuring rod touches the platform table, the se...
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