Cyclically liquid feeding apparatus

A liquid circulation and supply device technology, applied in cooling fluid circulation devices, household refrigeration devices, liquid level control, etc., can solve the problems of unbalance, large liquid level fluctuations, and high prices, and achieve easy temperature adjustment and elimination of liquid level. The effect of change, cheap installation
CN102737732AActive Publication Date: 2012-10-17SMC CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SMC CORP
Publication Date
2012-10-17

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Abstract

The invention provides a cyclically liquid feeding apparatus. An outer tank and an inner tank having liquid at different temperatures, and a load are connected to each other via outer and inner tank liquid circulating channels and a valve unit. A first opening-and-closing valve is connected to a first bypass flow-channel connecting an outer tank feed channel and an inner tank feedback channel, a second opening-and-closing valve is connected to a second bypass flow channel connecting an inner tank feed channel and an outer tank feedback channel to detect the liquid level of the liquid in the outer tank and the liquid level of the liquid in the inner tank by a liquid level sensor. The liquid levels are adjusted by selectively opening the first opening-and-closing valve and the second opening-and-closing valve when the liquid levels in both tanks become uneven in the process of cyclically feeding the liquid from the tanks to the load.
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Description

technical field

[0001] The present invention relates to a liquid circulation supply device for cooling a load by circulatingly supplying a cooling liquid to the load. More specifically, it relates to a liquid circulation supply device for cooling a load using two liquids having different liquid temperatures. Background technique

[0002] For example, in various manufacturing devices such as semiconductor manufacturing devices and liquid crystal manufacturing devices, in order to cool the device (load) that generates heat and keep the temperature constant, cooling liquid is circulated from a liquid circulation supply device to cool the load. In this case, as disclosed in the following Patent Documents 1-3, in order to perform high-precision temperature control according to the amount of heat of the load, it may be necessary to prepare two types of liquids with different liquid temperatures. , through a mixing assembly composed of a plurality of three-way valves, etc., the liq...

Claims

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