Assembling adhesive-dispensing device applied to micron order microtube and micropore

Abstract

The invention discloses an assembling adhesive-dispensing device for assembling a microtube of a microtube part and a micropore of a micropore part and dispensing adhesive. The assembling adhesive-dispensing device comprises a clamping locating system and a microscopy detecting system. The clamping locating system is used for clamping and locating the microtube part, the micropore part and an adhesive-dispensing needle. The microcopy detecting system is used for conducting image shooting and magnification on a working area and transmitting image signals of the shot image to a control main machine. The microscopy detecting system comprises a plurality of microscope assemblies, and magnification times and the depth of field of all the microscope assemblies are different. The clamping locating system comprises a microtube part clamping locating assembly, a micropore part clamping locating assembly and an adhesive-dispensing needle clamping locating assembly which are used for clamping and locating the microtube part, the micropore part and the adhesive-dispensing needle respectively. The assembling adhesive-dispensing device combines technology of microscopy vision detecting, micro-assembling and micro-adhesive-dispensing, has generality and practicality, and can achieve man-machine coordination assembling of the micron order microtube part and the micropore part and adhesive-dispensing operation.

Description

technical field [0001] The invention belongs to the technical field of micro-assembly and micro-dispensing, in particular to an assembly and dispensing device capable of assembling and dispensing micro-tubes and micro-holes of micron size. The invention can be used for assembly and dispensing of micron-scale micropipes and microholes in MEMS manufacturing. Background technique [0002] The end of the micron-sized microtube on the microtube part is inserted into the micron-sized micropore on the microporous part, and glue is dispensed at the joint to realize the connection and sealing of the structure, which is an assembly problem often encountered in the manufacturing process of MEMS systems. With the development of micromachining technology, the size and dispensing volume of microtubes and microholes are getting smaller and smaller, which greatly increases the difficulty of assembly and dispensing. [0003] Huazhong University of Science and Technology’s patent application...

AI Technical Summary

Problems solved by technology

[0006] In short, in the existing technology, although some progress has been made in the research on the assembly and dispensing of tiny parts, there are still the following problems: 1) The size of the assembled parts is large, usually millimeter or sub-millimeter level, which cannot meet the requirements of microns. 2) The dispensing volume is too large, and the minimum dispensing volume is nL (nanoliters, 10 -9 liter) level, which cannot meet the pL (picoliter, 10 -12 1) Requirements for dispensing; 3) Visual inspection accuracy and positioning accuracy of assembled parts are low during assembly, which cannot meet the sub-micron positioning requirements of micron-level parts features

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