Design method for baffle plate used for controlling film thickness distribution on conical optical element in film plating planetary system

Abstract

The invention provides a design method for a baffle plate used for controlling film thickness distribution on a conical optical element in a film plating planetary system. According to the invention, in the process of vacuum plating, a film material is transmitted in a vacuum environment in a manner of evaporation or sputtering and forms a film with nonuniformly distributed thickness on the surface of the conical optical element, a film thickness distribution model capable of reflecting actual thickness distribution of the film deposited on the conical optical element in a vacuum plating machine planetary system when the baffle plate is not used and a film thickness distribution model capable of reflecting actual thickness distribution of the film on the conical optical element when baffle plate correction is used are respectively established; evaporation or sputtering characteristics of the film material during vacuum plating are determined based on the film thickness distribution model when the baffle plate is not used, then film thickness distribution on the conical optical element is simulated by using theories for the film thickness distribution model when baffle plate correction is used, designing of the baffle plate is optimized by using a computer until film thickness distribution on the conical optical element in the vacuum plating machine planetary system meets design demands after utilization of baffle plate correction, and therefore, an optimal baffle plate design is obtained. The method provided by the invention can realize accurate control of film thickness distribution on the conical optical element.

Description

technical field [0001] The invention relates to the field of optical thin film element preparation, in particular to a baffle design method for controlling the film thickness distribution of a conical optical element in a coating planetary system. Background technique [0002] With the development of science and technology, the design of optical system is becoming more and more sophisticated. In order to meet the performance index of the optical system, conical optical elements are used in some optical systems, and a specially designed optical film is coated on the surface of the conical optical element to improve the performance of the conical optical element. The current techniques for preparing optical thin films on conical optical elements can be mainly divided into physical vapor deposition (PVD) and chemical vapor deposition (CVD). Physical vapor deposition is a process in which a thin film is deposited on the surface of a conical optical element by evaporating or spu...

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Problems solved by technology

[0005] As far as the planetary system of the vacuum coating machine is concerned, since the planetary revolution / rotation can be flexibly adjusted, the randomness of the position of any point on the coating surface of the conical optical element is very high, so that any point on the coating surface of the conical optical element is closely related to the evaporation or sputtering source. The projection trajectory of the line connecting any point on the surface on the plane where the baffle is placed is very complicated, which makes it difficult to have an analytical solution for the design of the baffle

The traditional baffle design method used to control the film thickness distribution on the optical element in the planetary system of the vacuum coating machine mainly relies on the coating experience and repeatedly optimizes the baffle design through a large number of process experiments to meet the specific film thickness distribution. The process is very long, and generally requires at least several or even dozens of experiments

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