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Gyro sensor and electronic device

A technology of electronic equipment and sensors, which is applied in the direction of gyroscope/steering sensing equipment, instruments, and gyro effect for speed measurement, etc. It can solve problems such as mutual interference, inability to miniaturize sensor components, and difficult sensor miniaturization

Inactive Publication Date: 2012-11-21
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, the conventional gyro sensor detects the angular velocity around three axes. Therefore, when the axes are arranged in the chip, there is a problem that the mounting area increases, and further improvement of the sensor element accompanying the demand for miniaturization of the entire device cannot be realized. miniaturization
[0006] In addition, since the vibration is independent for each angular velocity sensor of each axis, it is necessary to install a drive circuit for each angular velocity sensor, requiring an integrated circuit (IC) separately, increasing the mounting area, and making it difficult to miniaturize the sensor
In addition, there is a vibration mode for each angular velocity sensor, so there is a problem of mutual interference

Method used

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  • Gyro sensor and electronic device
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  • Gyro sensor and electronic device

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Embodiment Construction

[0043] Hereinafter, embodiments of the gyro sensor and electronic equipment of the present invention will be described in detail with reference to the drawings. figure 1 It is an explanatory diagram showing a schematic configuration of the gyro sensor of the present invention. In addition, in each figure, for convenience of description, an X axis, a Y axis, and a Z axis are shown as three mutually perpendicular axes. In addition, in this embodiment, the direction parallel to the X-axis (first axis) is called the X-axis direction, the direction parallel to the Y-axis (second axis) is called the Y-axis direction, and the direction parallel to the Z-axis (second axis) is called the Y-axis direction. 3 axis) parallel direction is called Z-axis direction.

[0044] figure 1 The shown gyro sensor 10 has the following parts formed on the vibration system structure 12 as the main basic structure: the first mass part 40, which has a first detection part, and the first detection part is ...

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Abstract

A gyro sensor according to the invention includes a first mass portion (40)including a first detection portion(42), a second mass portion(20) including a second detection portion(22), first drive portions(70a,70b) vibrating the first mass portion(40) in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion(40) and the second mass portion(20) are connected with the force conversion portion(80). The force conversion portion(80) is displaced with the anchor portion(90) as an axis, and vibrates the second mass portion(20) in a direction of a second axis crossing the first axis in a plane view.

Description

technical field [0001] The present invention relates to a gyro sensor and an electronic device using the gyro sensor. Background technique [0002] In recent years, gyro sensors that detect angular velocity have been widely used in posture control such as car navigation systems and camera shake correction. Among such gyro sensors, there are sensors that have detection elements for each axis capable of detecting angular velocities around the X-axis, Y-axis, and Z-axis that are perpendicular to each other. [0003] The gyro sensor disclosed in Patent Document 1 is a multi-axis angular velocity sensor that detects angular velocity with respect to first to third detection axes that are perpendicular to each other, and includes a first vibration-type angular velocity sensor element that detects angular velocity with respect to the first detection axis, The second vibration-type angular velocity sensor element that detects the angular velocity with respect to the second detection...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5719
CPCG01C19/574G01C19/5733G01C19/5719
Inventor 金本启
Owner SEIKO EPSON CORP