Electric discharge element and method for manufacturing same
A technology of a discharge element and a manufacturing method, which is applied in the directions of electrical components, electrode manufacturing, manufacturing tools, etc., can solve the problems of difficulty in adjusting characteristics, difficulty in realizing cost reduction, and difficulty in improving manufacturing yield, etc., and achieves a simple and low-cost manufacturing method. , the effect of high manufacturing yield
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no. 1 approach
[0052] figure 1 It is a schematic perspective view of the discharge element concerning 1st Embodiment of this invention. figure 2 yes figure 1 A schematic partial cross-sectional view of the discharge element shown. Such as figure 1 , figure 2As shown, the discharge element 100 includes a base 10 , a first electrode 20 and a second electrode 30 .
[0053] The susceptor 10 is composed of a cylindrical lower part 11 and a cylindrical upper part 12 located on the lower part 11 and having a slightly smaller outer diameter than the lower part 11 , and has a hole 13 through which the second electrode 30 penetrates. The base 10 is made of an insulating material such as ceramics.
[0054] The first electrode 20 is made of a conductive material capable of plastic deformation such as brass, and has: an internal space 21 formed in a cylindrical body; an opening 22 communicating with the internal space 21; two terminals 23; the gas introduction part 24; and the deformation part 25...
no. 2 approach
[0077] Image 6 It is a schematic perspective view of the discharge element concerning 2nd Embodiment of this invention. Figure 7 yes Image 6 A schematic partial cross-sectional view of the discharge element shown. Such as Image 6 , Figure 7 As shown, the discharge element 200 includes a base 10 , a first electrode 20A, and a second electrode 30 . The susceptor 10 and the second electrode 30 are the same as the corresponding elements of the discharge element 100 of the first embodiment, so the first electrode 20A will be specifically described below.
[0078]Like the first electrode 20 of the discharge element 100, the first electrode 20A is made of a plastically deformable conductive material such as brass, and the first electrode 20A has an internal space 21 formed in a cylindrical body; An opening 22 communicating with the internal space 21 ; two terminals 23 ; and a gas introduction portion 24 . Furthermore, this first electrode 20A has a groove 26 and a deformat...
no. 3 approach
[0082] Figure 8 It is a schematic perspective view of the discharge element concerning 3rd Embodiment of this invention. Such as Figure 8 As shown, the discharge element 300 includes a base 10A, a first electrode 20B, and a second electrode 30 . The second electrode 30 has the same components as those of the discharge element 100 of the first embodiment, and therefore, the susceptor 10A and the first electrode 20A will be specifically described below.
[0083] The base 10A is cylindrical and has a hole (not shown) through which the second electrode 30 is inserted. Furthermore, the base 10A is made of an insulating material such as ceramics.
[0084] Like the first electrode 20 of the discharge element 100, the first electrode 20B is made of a plastically deformable conductive material such as brass, and has an internal space 21 formed in a cylindrical body; An opening 22 communicating with the internal space 21 ; two terminals 23 ; a gas introduction part 24 ; and a defo...
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Abstract
Description
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