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Device for referenced measurement of reflected light and method for calibrating such a device

A calibration method and reference standard technology, applied in the field of optical equipment, can solve the problem of high processing cost

Active Publication Date: 2013-01-02
卡尔蔡司光谱有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the handling of reference standards is expensive when the specimens have to be processed and measured in vacuum

Method used

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  • Device for referenced measurement of reflected light and method for calibrating such a device
  • Device for referenced measurement of reflected light and method for calibrating such a device
  • Device for referenced measurement of reflected light and method for calibrating such a device

Examples

Experimental program
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Embodiment Construction

[0076] Figure 1A to Figure 1B A cross-section is shown of an exemplary measuring device 1 according to the second aspect of the invention, switchable between a measuring position and a calibration position. in minutes Figure 1A The device 1 is located at the measurement position, in the minute Figure 1B in the calibration position. The device 1 is part of a production monitoring device in which a sample X, for example coated flat glass, is transported past the device 1 .

[0077] The device 1 comprises a housing 2 enclosing a hollow body 3 in the form of an Ulbricht photometric sphere, a first light receiver 4 and a second light receiver 5 each configured as a coupling site in the respective optical waveguide, a light source 6 , a reference standard 7 , two optical shutters 8 and a spectrometer 9 . The housing 2 has a light-transmitting hole 10 with a light-transmitting protective glass 11 . For example, an entrance slit 12 , an imaging diffraction grating 13 and an opt...

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PUM

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Abstract

The present invention relates to a device for referenced measurement of a reflected light and a method for calibrating such a device, wherein, in order to realize a more accurate calibration, according to the present invention, the device (1) can be switched from a measuring position to a calibrating position, wherein a light-exit opening (17) lies on a first detection axis (A) in the measuring position, and lies on a second detection axis (B) in the calibrating position. Another alternative is characterized in that for switching the device (1) from the measuring position to the calibrating position, a hollow body (3) including the light-exit opening (17) and optical receivers (4, 5) should be supported so that it can rotate around an axis (Q) different from the first detection axis (A), wherein the first optical receiver (4) is aligned in both positions for receiving the light entering the hollow body (3) through the light-exit opening (17), and the second optical receiver (5) is aligned in both positions for receiving the light scattered by a layer (15).

Description

technical field [0001] The invention relates to a device for measuring light reflected on a sample, comprising: a hollow body with a light exit aperture for illuminating the sample and a diffuse scattering layer inside it; A light source; a first light receiver aligned along a first detection axis; a second light receiver aligned along a second detection axis, and methods for calibrating such devices. Background technique [0002] The term "light" in the sense of the present invention includes every electromagnetic radiation which can be manipulated by optical devices, ie in particular ultraviolet, visible and infrared radiation. The detection axis of the light receiver specifies, for example, the axis of symmetry of its field of view, which may in particular be the optical axis of the light receiver. Geometrically it concerns a spatial distance starting within the light receiver involved. Each optical receiver may, for example, be an optical waveguide or a respective end ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/55
CPCG01N21/474G01N21/255G01N21/4785G01J3/02G01J3/44
Inventor J·马格拉夫P·拉姆帕特
Owner 卡尔蔡司光谱有限责任公司