Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof
A technology of elastic film and servo valve, applied in fluid pressure actuators, servo motor components, mechanical equipment, etc., can solve the problems of small and micro-flow control servo valves with poor reliability, and achieve control without dead zone and damping stability Good, compact effect
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specific Embodiment approach 1
[0032] Specific implementation mode 1. Combination figure 1 Describe this specific embodiment, the piezoelectric fluid actuates the elastic membrane position electric feedback type two-stage servo valve, which includes a main valve body 1, a pilot valve body 5 and a servo valve controller 10;
[0033] The main valve body 1 is provided with a No. 1 fixed damping hole 2, a displacement sensor 11, a No. 2 fixed damping hole 12, a slide valve cavity 14 and a No. 5 flow channel f;
[0034] The pilot valve body 5 is provided with a No. 1 variable orifice 6, a No. 2 variable orifice 8, a piezoelectric fluid actuated elastic film assembly 7, a No. 1 flow channel a, a No. 2 flow channel b, a No. 3 flow channel c and No. 4 runner d;
[0035] The slide valve cavity 14 has a built-in No. 1 balance spring 3, a slide valve 4 and a No. 2 balance spring 9; the side wall of the slide valve cavity 14 is provided with a liquid outlet 18, a No. 1 liquid inlet and outlet 19, and a No. 2 liquid in...
specific Embodiment approach 2
[0047] Specific embodiment two, combine figure 2 Describe this embodiment. This embodiment is a further description of Embodiment 1. The piezoelectric fluid-actuated elastic film assembly 7 described in this embodiment includes a No. 1 elastic film 7-1 and a No. 1 elastic film fixing frame 7 -2, No. 1 bellows 7-3, first closed chamber 7-4, No. 1 fixed sleeve 7-5, piezoelectric film 7-6, No. 2 fixed sleeve 7-8, second closed chamber 7-9, No. 2 bellows 7-10, No. 2 elastic membrane fixing frame 7-11 and No. 2 elastic membrane 7-12;
[0048] No. 1 elastic film 7-1, No. 1 bellows 7-3, No. 1 fixed sleeve 7-5 and piezoelectric sheet 7-6 enclose the first closed cavity 7-4; No. 1 elastic film 7-1 covers the No. 1 One end of the corrugated tube 7-3 is connected to the No. 1 corrugated tube 7-3 through the No. 1 elastic membrane fixing frame 7-2, and the other end of the No. 1 corrugated tube 7-3 is connected to the piezoelectric Sheet 7-6 is fixedly connected;
[0049] Piezoelectri...
specific Embodiment approach 3
[0050] Specific embodiment three, combine Figure 1 to Figure 3 Describe this embodiment, the piezoelectric fluid actuated elastic membrane position electric feedback type two-stage servo valve control method described in this embodiment, the realization process of this method is as follows:
[0051] The spool displacement signal of the slide valve is input from an external input device to the servo valve controller 10, and the servo valve controller 10 generates a current excitation signal to the piezoelectric sheet 7-6 of the piezoelectric fluid actuated elastic film assembly 7 according to the displacement signal, The piezoelectric sheet 7-6 is deformed, and the degree of deformation is approximately proportional to the magnitude of the excitation current;
[0052] When the input excitation current is a positive current, the piezoelectric sheet 7-6 will deform in the direction of the No. 1 elastic film 7-1, so that the piezoelectric fluid actuates the elastic film assembly ...
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