Quartz micromechanical tuning fork gyroscope

Abstract

The invention belongs to the technical field of inertia devices and discloses a quartz micromechanical tuning fork gyroscope. A tuning fork structure of the micromechanical tuning fork gyroscope comprises two driving arms, two sensitive arms and one bearing beam shaped like a Chinese character 'wang'; the bearing beam shaped like the Chinese character 'wang' is composed of an upper beam, a middle beam, a lower beam and a longitudinal beam; the two driving arms and the two sensitive arms are arranged on the middle beam and are respectively symmetrically located at two sides of the longitudinal beam; sensitive charges are distributed on fork fingers in bilateral symmetry; and a side electrode is not needed to be blocked again, so that the problem that the blocked electrode is high in machining difficulty is solved. Meanwhile, accelerated speeds and various coupling effects can be eliminated through utilizing the symmetry of the structure. Through increasing the number of the fork fingers, the sensitivity is improved, the advantages of the symmetry of an H-shaped structure and introduction of a feedback electrode are absorbed, and the advantage that an electrode of a planar structure is easy to manufacture is also absorbed.

Description

technical field [0001] The invention relates to the technical field of inertial devices, in particular to a quartz micromechanical tuning fork gyroscope. Background technique [0002] With the development of domestic attitude control and navigation technology, the demand for localized high-precision gyroscope products is becoming more and more urgent. The existing quartz micromachined gyroscopes are the most widely used, mainly including U-shaped structure quartz micromachined gyroscopes and H-shaped structure quartz micromachined gyroscopes. [0003] The sensitive electrodes on the side of the U-shaped quartz micromachined gyroscope need to be divided into blocks, the manufacturing process is difficult, and the thickness and width of the fork fingers are close to each other, and the coupling between the driving signal and the detection signal is serious. The H-shaped structure quartz micromachined gyroscope also needs to use side block detection electrodes to obtain higher...

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Problems solved by technology

[0005] The invention provides a quartz micromechanical tuning fork gyroscope, which is used to solve the problem that the side of the existing quartz micromechanical gyroscope needs block sensitive electrodes and detection electrodes, but the block electrode manufacturing technology is immature and the processing is difficult.

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