Zone-melting furnace upper shaft with water cooling function

Abstract

The invention relates to non-metal crystal manufacturing equipment, and aims to provide a zone-melting furnace upper shaft with a water cooling function. The zone-melting furnace upper shaft comprises a cylindrical spindle and a hanging tray; the spindle is hollow, an upper end cover is arranged at the upper end of the spindle, and a spindle inner core is arranged at the lower end of the spindle; the bottom edge of the spindle inner core is connected with the bottom edge of the spindle, and a main body of the spindle inner core extends into the spindle and is in close fit with the inner wall of the spindle; the bottom of the spindle inner core is closed by a lower end cover, a sheath mandrel penetrates through the center of the lower end cover, one end of the sheath mandrel is connected to the center of the spindle inner core, and the other end of the sheath mandrel is connected to the center of the hanging tray; and a water inlet channel and a water outlet channel are arranged on the upper end cover, the water inlet channel or the water outlet channel is connected with a steel water pipe, and the other end of the steel water pipe extends to the upper end of the spindle inner core. The zone-melting furnace upper shaft is provided with an excellent water cooling system, stable movement of the upper shaft can be guaranteed, influence of fusion of polycrystalline materials to the temperature of the upper shaft during crystal pulling can be effectively reduced, and a sealing part is protected.

Description

technical field [0001] The invention relates to a non-metallic crystal manufacturing equipment, in particular to an upper shaft of a zone melting furnace with water cooling function. Background technique [0002] The zone melting furnace is a new type of monocrystalline silicon growth furnace, which uses a coil to heat the polycrystalline silicon rod to partially melt it, and then welds it with a single crystal seed crystal from below to induce a single crystal. The upper shaft of the zone melting furnace is a transmission mechanism for polycrystalline materials to rotate and lift. The furnace body is a sealed cavity filled with high-pressure protective gas. The drive system of the upper shaft is located outside the furnace body. The sealing performance puts forward high requirements. The currently used seals require that the temperature not be too high, otherwise it will affect the sealing effect and even damage the seals. When the zone furnace is working, the molten poly...

AI Technical Summary

Problems solved by technology

The currently used seals require that the temperature not be too high, otherwise it will affect the sealing effect and even damage the seals. When the zone furnace is working, the molten polysilicon will radiate a lot of heat to the surroundings, causing the temperature of the upper shaft to rise, which may Damage to the seals, so an effective water cooling system is essential for the upper shaft

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