Optical system and method for measuring thermal physical property parameters of solid

A technology of thermophysical parameters and optical systems, applied in measuring devices, material analysis through optical means, scientific instruments, etc., can solve the problems of low efficiency of frequency doubling, difficulty in precise control, and damage detection, etc., and achieve optical path adjustment Convenience, the effect of a simple measurement system

Active Publication Date: 2013-02-27
江苏中国科学院能源动力研究中心 +1
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Problems solved by technology

The 3ω method is a commonly used method for measuring thermal physical properties of thin film materials, but it needs to weld metal sheets / wires on the sample to be tested, which belongs to the destructive testing technology
[0005] However, for figure 1 In terms of the optical path system for measuring the thermal and physical parameters of solids shown, the electronically controlled displacement platform is a mechanical moving part, and it is difficult to control accurately; and the frequency doubling module composed of the first focusing lens, the frequency doubling crystal and the second focusing lens, Collinear focusing is difficult and the efficiency of frequency multiplication is not high

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  • Optical system and method for measuring thermal physical property parameters of solid
  • Optical system and method for measuring thermal physical property parameters of solid
  • Optical system and method for measuring thermal physical property parameters of solid

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[0016] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0017] It should be noted that, in the drawings or descriptions of the specification, similar or identical parts all use the same figure numbers. Implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art. Additionally, while illustrations of parameters including particular values ​​may be provided herein, it should be understood that the parameters need not be exactly equal to the corresponding values, but rather may approximate the corresponding values ​​within acceptable error margins or design constraints. In addition, the directional terms mentioned in the following embodiments, such as "upper", "lower", "front", "rear", "left", "right", etc., are only re...

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Abstract

The invention provides an optical system and a method for measuring thermal physical property parameters of a solid. The optical system comprises a heating laser production assembly, a detection laser production assembly, a beam combining element, a beam split element, a heating laser receiving assembly, a sample test assembly and a detection laser receiving assembly. The method uses a signal modulating photo-thermal reflection method and belongs to a frequency domain method, and compared with time domain methods of ultrashort pulse laser pumping detection methods and the like, the method has the advantages that mechanical moving components are absent, the measuring system is relatively simple, and light path adjustment is more convenient.

Description

technical field [0001] The invention relates to a photothermal reflection measurement technology using periodic modulation heating and continuous laser detection, in particular to an optical system and method for measuring solid thermophysical parameters. Background technique [0002] Thin film materials have been widely used in microelectronics, optoelectronics, micromanufacturing and other fields, and these micro / nano devices will generate extremely high heat flux density during operation, and heat accumulation will directly affect the working efficiency and reliability of such devices. It is extremely urgent to solve the heat dissipation problem of the above-mentioned micro / nano devices, which requires accurate characterization of the thermophysical properties of the thin film materials that make up the above-mentioned micro / nano devices, especially the thermal conductivity and interface thermal resistance, in order to reveal the heat transport mechanism. The 3ω method is...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17
Inventor 邱琳徐先锋唐大伟祝捷布文峰
Owner 江苏中国科学院能源动力研究中心
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