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Large-diameter sprayer of MOCVD (metal organic chemical vapor deposition) reactor

A spray head and reactor technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of spray head processing, increased manufacturing difficulty, difficulty in spray head cooling, and reduced yield and other problems, to achieve the effect of increasing manufacturing difficulty, improving yield rate, and reducing processing area

Active Publication Date: 2013-03-06
HANGZHOU SILAN AZURE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] First, the difficulty of processing and manufacturing the sprinkler head has increased sharply, and it will be accompanied by a decline in yield;
[0006] Second, the cooling of the sprinkler head will encounter greater difficulties;
[0007] Third, the concentration distribution of group III gases in the direction of the cavity diameter will face greater challenges

Method used

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  • Large-diameter sprayer of MOCVD (metal organic chemical vapor deposition) reactor
  • Large-diameter sprayer of MOCVD (metal organic chemical vapor deposition) reactor
  • Large-diameter sprayer of MOCVD (metal organic chemical vapor deposition) reactor

Examples

Experimental program
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Embodiment Construction

[0050] Figures 1 to 25 A showerhead showing one embodiment of the present invention can be used on a large diameter MOCVD reactor.

[0051] Such as figure 1 As shown, in an embodiment of the present invention, the shower head includes a top assembly 1 , a cooling water ring 2 , and a spray assembly 3 . The top assembly 1, the cooling water ring 2, and the spray assembly 3 will be described respectively below, and then the overall structure of the spray head will be described.

[0052] Such as Figure 9 , Figure 10 , Figure 11As shown, the top assembly 1 includes an upper cover plate 11 and a distribution orifice plate 12 , and the distribution orifice plate 12 is detachably connected to the upper cover plate 11 . The distribution orifice plate 12 includes four equally divided orifice plates 121 , and the four orifice plates 121 have the same structure, and the following description on one orifice plate 121 is also applicable to the other three orifice plates 121 . The...

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PUM

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Abstract

The invention aims to provide a large-diameter sprayer of an MOCVD (metal organic chemical vapor deposition) reactor. Processing difficulty of the sprayer cannot be evidently increased with increase of the diameter. The large-diameter sprayer of the MOCVD reactor comprises an III-group cavity, a V-group cavity and a cooling water cavity, and is characterized in that the III-group cavity, the V-group cavity and the cooling water cavity are respectively divided into N cavities, the N is a natural number larger than or equal to 2, and each cavity is a single body.

Description

technical field [0001] The invention relates to a spray device for conveying gas, in particular to a shower head of an MOCVD reactor, comprising a group III cavity through which group III gas flows, a group V cavity through which group V gas flows, and a cooling water cavity through which cooling water flows. Background technique [0002] MOCVD is the English abbreviation of Metal-organic Chemical Vapor Deposition (Metal-organic Chemical Vapor Deposition). For subsequent reactions, growth gases and dopants are supplied to the reactor and deposited on the substrate surface. [0003] Conventional showerheads used in MOCVD reactors, such as those provided by Thomas Swan Scientific Equipment Limited, have a three-chamber "sandwich" structure. Group III gases flow into the reaction chamber through distribution pipes and Group III chambers, and Group V gases flow through V The family chamber flows into the reaction chamber, and the bottom layer is the cooling water chamber. [0...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455
CPCC23C16/455C23C16/45565C23C16/45572
Inventor 徐小明周永君邬建伟丁云鑫
Owner HANGZHOU SILAN AZURE
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