Gas filling method for vacuum equipment door opening process and control device for gas filling process
A technology of vacuum equipment and control devices, applied in the direction of fluid pressure control without auxiliary power, electrical components, climate sustainability, etc., to achieve the effects of reducing operating frequency, eliminating the reduction of sealing performance, and prolonging life
Active Publication Date: 2013-03-06
WUXI SUNTECH POWER CO LTD
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Problems solved by technology
[0005] In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present invention is to reduce the waste of nitrogen, reduce the action of the pressure relief valve, and prolong its service life
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[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.
[0025] The quartz furnace tube of the coating equipment used in the solar cell production process is described below as an example of vacuum equipment, that is, the furnace tube 1 in this implementation. Those skilled in the art should understand that the "vacuum equipment" in the present invention includes But not limited to the furnace tube 1 in this implementation, as long as it is a vacuum device that needs to be filled with gas when it is opened, the gas charging method for the vacuum device door opening process and the control device for the vacuum device gas charging process of the present invention can be used.
[0026] It should be noted that, in the present invention and its embodiments, the connection between the PLC and the intake valve and the exhaust valve should be unders...
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The invention discloses a gas filling method for the vacuum equipment door opening process and a control device for the gas filling process. The gas filling method includes the steps: (1) opening a gas inlet valve connected with vacuum equipment and filling gas to the vacuum equipment; (2) when pressure in the vacuum equipment reaches a first preset value, closing the gas inlet valve and stopping gas supply; and (3) opening the vacuum equipment. The gas filling method for the vacuum equipment door opening process and the control device for the gas filling process have the advantages that the gas inlet valve is closed before a furnace door is opened, and accordingly unnecessary nitrogen waste can be avoided; and since a relief valve actuates only when the pressure in the vacuum equipment is overhigh, the relief valve can be actuated less and even does not be actuated, actuating frequency of the relief valve is lowered, the life of the relief valve can be prolonged, hidden danger that performances of the relief valve are lowered is reduced, and operating and maintenance costs of the equipment are lowered.
Description
technical field [0001] The innovation of the present invention relates to the field of cell manufacturing, and mainly relates to a gas charging method for opening the door of vacuum equipment and a control device for the gas charging process of vacuum equipment. The vacuum equipment can be quartz furnace tubes in the coating process, etc. Equipment that operates under vacuum ambient conditions. Background technique [0002] The quartz furnace tube of the coating equipment is usually in a vacuum state. At the end of the coating process, when the furnace door needs to be opened, the system will automatically fill nitrogen into the furnace tube, and the furnace door is only allowed to be opened when the pressure in the furnace tube reaches an atmospheric pressure. like figure 1 As shown, in the prior art, the device for controlling the filling process of the vacuum equipment includes a PLC for controlling and a pressure sensor for detecting the pressure in the vacuum equipmen...
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Login to View More IPC IPC(8): H01L31/18G05D16/04
CPCY02P70/50
Inventor 姚小明武超
Owner WUXI SUNTECH POWER CO LTD