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Binary phase modulator based on mems micromirror array

A technology of micromirror array and binary phase, which is applied in the direction of instruments, optical components, optics, etc., to achieve the effect of reasonable design, elimination of laser speckle, and reduction of speckle contrast

Inactive Publication Date: 2014-10-22
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to solve the problem that the existing phase modulator based on the micromirror array must rely on a large number of CMOS registers for independent control, the present invention provides a binary phase modulator based on the MEMS micromirror array to realize laser speckle inhibition

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  • Binary phase modulator based on mems micromirror array
  • Binary phase modulator based on mems micromirror array
  • Binary phase modulator based on mems micromirror array

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Embodiment Construction

[0026] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0027] Such as figure 1 , 2 Shown, a kind of binary phase modulator based on MEMS micromirror array, comprises insulating substrate 14, is integrated with micromirror array on described insulating substrate 14, and described each micromirror is provided with the bottom that stops bolt 15 Composed of a micromirror and an upper micromirror, all the lower micromirrors are connected in a diagonal direction to form a parallel lower micromirror electrode group, and each lower micromirror electrode in the lower micromirror electrode group is connected to a voltage signal that provides a random change The signal source is connected; all the upper micromirrors are connected in a diagonal direction to form a parallel upper micromirror electrode group, and each upper micromirror electrode in the upper micromirror electrode group is connected to a signa...

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Abstract

The invention relates to the technical field of laser display, and in particular relates to a binary phase modulator for inhibiting laser speckle, solving the problem of conventional phase modulator based on the micro-mirror array that a large number of CMOS (Complementary Metal-Oxide-Semiconductor Transistor) registers need to perform individual control. The binary phase modulator based on an MEMS (Micro-electromechanical Systems) micro-mirror array comprises an insulating substrate on which the micro-mirror array is integrated; each micro-mirror comprises a lower micro-mirror and an upper micro-mirror which are both provided with stopping screws; all the lower micro-mirrors are diagonally connected to form a parallel lower micro-mirror electrode set; each lower micro-mirror electrode in the lower micro-mirror electrode set is linked with a signal source which is used for providing a voltage signal, wherein the voltage signal is varied at random; all the upper micro-mirrors are diagonally connected to form a parallel upper micro-mirror electrode set; and each upper micro-mirror electrode in the upper micro-mirror electrode set is linked with a signal source which is used for providing the voltage signal, wherein the voltage signal is varied at random. The binary phase modulator based on the MEMS micro-mirror array is reasonable in design and can effectively remove the laser speckle.

Description

technical field [0001] The invention relates to the technical field of laser display, in particular to a binary phase modulator for laser speckle suppression. Background technique [0002] When coherent light (such as laser light) is transmitted through a rough scatterer or is reflected by a rough scatterer, the interference of light waves will occur on the rough surface of the scatterer: that is, speckles are formed, which show granular contrast between light and dark. Uniform light intensity distribution. In laser displays, the presence of speckle degrades image quality and must be suppressed. [0003] In the book 'Speckle Phenomena in Optics: Theory and Application', Joseph W. Goodman summarized and analyzed the speckle suppression method and device in laser display projection, by analyzing the random speckle light field on the screen in the time domain Light intensity superposition rather than amplitude superposition is carried out in the integration, which can effecti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/06G02B27/48
Inventor 仝召民陈旭远高文宏石云波
Owner ZHONGBEI UNIV
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