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Electromagnetic-driven micro mirror

A technology for driving micromirrors and electromagnetics, applied in electrical components, electromechanical devices, optics, etc., can solve the problems of high energy consumption, slow response speed, etc., to increase the driving force, reduce the driving voltage or current, and increase the driving capacity. Effect

Active Publication Date: 2013-03-13
SUZHOU NAFANG TECH DEV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the electrothermal drive has a large driving force, its disadvantages of slow response and high energy consumption limit its further use in micromirrors.

Method used

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  • Electromagnetic-driven micro mirror
  • Electromagnetic-driven micro mirror
  • Electromagnetic-driven micro mirror

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Embodiment Construction

[0028] The technical solutions in the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0029] refer to Figure 1-3 , the electromagnetically driven micromirror includes a micromirror plate 1, the center of the micromirror plate 1 is provided with a mirror surface 6, and the edge of the micromirror plate 1 is provided with at least one closed-loop drive coil 2, The two ends are respectively connected to a support frame 5 through a torsion beam 3, and at least one permanent magnet 4 is respectively arranged on both sides of the support frame 5. Aft...

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Abstract

The invention discloses an electromagnetic-driven micro mirror which comprises a micro reflector plate, wherein a reflector surface is arranged at the center of the micro reflector plate; at least one closed ring-shaped driving coil is arranged at the edge of the micro reflector plate; two ends of the driving coil are respectively connected with a support frame through a twisting beam; at least one permanent magnet is arranged at each of two sides of each support frame; and after current is provided to the driving coil, the micro reflector plate is capable of twisting around the twisting beam under the driving of electromagnetic force generated by mutual action of the driving coil and the permanent magnets. The electromagnetic-driven micro mirror has the advantages of large twisting angle, low driving voltage and the like, is capable of realizing high-frequency resonance wide-angle scanning and realizing non-resonance low-speed wide-angle scanning, and can be applied to the optical instruments such as light beam scan, projection and display systems, spectrographs, bar code scanners, confocal microscopes and endoscopes.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, and in particular provides an electromagnetically driven micromirror. Background technique [0002] Generally speaking, there are four driving modes of the micromirror, namely, electrostatic drive, piezoelectric drive, electrothermal drive, and electromagnetic drive. Micromirrors with different driving methods have different performance characteristics. [0003] At present, electrostatic driving is the most widely used driving method for micromirrors. There are two types of electrostatically driven micromirrors: flat capacitive and comb-like interdigital. In comparison, the comb-like interdigitated electrostatically driven micromirror can obtain a larger torsion angle at a relatively small driving voltage, but there are still problems of insufficient driving force and too high driving voltage, which makes it in the non-resonant state. , it is difficult to obtain a ...

Claims

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Application Information

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IPC IPC(8): G02B26/08H02K33/18
Inventor 王敏锐李文翔张宝顺
Owner SUZHOU NAFANG TECH DEV
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