Mask plate used for evaporation and manufacturing method thereof

A manufacturing method and masking plate technology, which are applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of deviation of evaporation holes, reduction of evaporation effect, deformation of evaporation holes, etc., and achieve improved Accuracy and stability, reduce manufacturing cost, improve the effect of manufacturing precision

Inactive Publication Date: 2013-04-03
南京澄超光电科技有限公司
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  • Abstract
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Problems solved by technology

However, when the mask is welded to the frame, the mask needs to be flattened and tightened, and the evaporation holes have been made on the mask, and the evaporation holes will be deformed by the tension during the flattening process. , so that the evaporation hole deviates from the original design size and shape, resulting in

Method used

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  • Mask plate used for evaporation and manufacturing method thereof
  • Mask plate used for evaporation and manufacturing method thereof
  • Mask plate used for evaporation and manufacturing method thereof

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Embodiment Construction

[0030] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to understand the essence of the present invention more clearly and intuitively.

[0031] figure 1 It is a schematic diagram of the structure of the mask plate for evaporation in the embodiment of the present invention Figure 1 ; figure 2 It is a schematic diagram of the structure of the mask plate for evaporation in the embodiment of the present invention Figure II .

[0032] refer to figure 1 As shown, this embodiment provides a mask for evaporation, including a plate frame 1 and a mask plate 2 flattened and fixed on the plate frame. The mask plate 2 is provided with a plurality of evaporation holes 3 arranged regularly. The vapor deposition hole 3 is located at the center of the mask plate 2 and inside the plate frame 1 . A circle of buffer holes 4 is provided around the vapor deposition hole 3 for buf...

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Abstract

The invention relates to a mask plate used for evaporation and a method manufacturing method thereof. The mask plate comprises a plate frame and a mask plate that are fixed on the plate frame. A plurality of deposition holes are regularly arranged in the mask plate. The deposition holes are disposed in the centre of the mask plate. At least a row of cushion holes are disposed outside of the deposition holes. The cushion holes are parallel to the deposition holes. According to the manufacturing method, the deposition holes in the mask plate do not deform after a manufacturing process of the mask plate used for evaporation is completed. The effect is more remarkable when the method is used for producing a large-size mask plate used for evaporation, so that precision of the mask plate can be increased effectively, a manufacturing precision of an OLED display screen particularly a large-size OLED display screen is increased significantly and manufacturing cost is reduced.

Description

technical field [0001] The invention relates to the technical field of OLED display manufacturing, in particular to a mask plate for evaporation and a manufacturing method thereof. Background technique [0002] Organic electroluminescent devices have many advantages such as self-luminescence, fast response time, wide viewing angle, low cost, simple manufacturing process, good resolution and high brightness, and are considered to be the emerging application technology of the next generation of flat-panel displays. In OLED (Organic Light-Emitting Diode, organic electroluminescent diode) technology, the mask plate technology in vacuum evaporation is a very important and key technology, and the precision level of this technology directly affects the quality and manufacturing cost of OLED products . [0003] In a traditional evaporation mask, the required evaporation holes are first processed on the mask, and then the mask is welded to the frame. However, when the mask is welde...

Claims

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Application Information

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IPC IPC(8): C23C14/04
Inventor 唐军
Owner 南京澄超光电科技有限公司
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