System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof

Abstract

The invention relates to a system capable of automatically compensating and focusing in a process of automatic scanning, an implementation method thereof and an application thereof on a microscope, and is used for compensating and revising tiny errors caused by factors such as mechanical motions, machining work and installations, and expansions caused by heat and contractions caused by cold, so that the microscope is guaranteed to gain a clear image on each view field in the process of scanning. The system capable of automatically compensating and focusing comprises a target platform and an imaging device. The target platform moves in a plane. The imaging device moves in a direction perpendicular to the target platform. The system capable of automatically compensating and focusing further comprises a focusing and compensating system which comprises at least two displacement measuring devices. The first displacement measuring device is installed on the target platform and is used for detecting displacement errors in the vertical direction in the movement process of the target platform. The second displacement measuring device is installed on the imaging device and is used for detecting a relative distance between a lens of the imaging device and the target platform.

Description

technical field [0001] The present invention relates to a compensating focusing system, more specifically, to a system for automatically compensating focusing during automatic scanning, and a method for realizing it, which is applied to a microscope to correct Small errors caused by factors such as installation, thermal expansion and contraction are compensated and corrected, so as to ensure that each field of view can obtain a clear image during the scanning process of the microscope. Background technique [0002] The automatic microscope scanning system is a high-precision scanning instrument that has appeared in recent years, and is widely used in medical research, clinical application, biological research and industrial application. Conventional microscope scanning systems such as figure 1 As shown, the objective lens 102 remains stationary during focusing, and the stage 101 drives the measured object to move up and down. There is also a sensor that uses a sensor to de...

AI Technical Summary

Problems solved by technology

When the actual stage moves X and Y, errors will occur due to mechanical processing and assembly errors, which will cause micron-level fluctuation errors on the surface of the stage. As long as this fluctuation exceeds the depth of field of the objective lens, it will affect the image clarity

[0006] Third, when the sensor is used to detect the Z-axis displacement of the stage, only the lifting displacement of the stage is detected, and the influence of the first and second points above is often ignored, resulting in an unsatisfactory actual effect

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