Phase detecting device based on clamped beam capacity type micromechanical microwave power sensor

Abstract

The invention discloses a phase detecting device based on a clamped beam capacity type micromechanical microwave power sensor. The detecting device comprises a clamped beam capacity type micromechanical microwave power sensor, a power combiner, a phase shifter with digits adjustable, and a capacity-digital converter, wherein a referenced microwave signal (Vref) which is the same as a signal (Vx) to be detected in frequency is added to a first input port (10) of the power combiner, the signal (Vx) to be detected is added to an input port (7) of the phase shifter with the digits adjustable and added to a second input port (11) of the power combiner after phase shifting through the phase shifter with the digits adjustable (8), the referenced microwave signal (Vref) and the signal (Vx) to be detected reach an output port (13) of the power combiner after vectorial resultant through the power generator (12), and then the referenced microwave signal (Vref) and the signal (Vx) to be detected are added to an input port (14) of the clamped beam capacity type micromechanical microwave power sensor. According to the phase detecting device based on the clamped beam capacity type micromechanical microwave power sensor, the aim of accurate detection of phases of the microwave signal is achieved.

Description

technical field [0001] The invention proposes a microwave phase detection device based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave technology research, microwave phase is an important parameter to characterize the characteristics of microwave signals. The phase detection device is widely used in phase-locked loop (PLL) and other aspects. The Gilbert multiplier composed of field effect transistors is the most widely used microwave phase detector. The two input ends of the multiplier are respectively connected to the reference signal and the signal to be measured, you can get a high-frequency term and a low-frequency term, and then filter out the high-frequency term by a low-pass filter to obtain the phase difference between them, but this process will bring non-negligible noise. and power consumption, thus affecting the detection accuracy. Since the...

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Problems solved by technology

Phase detection devices are widely used in phase-locked loops (PLL), etc. The Gilbert multiplier composed of field-effect transistors is the most widely used microwave phase detector. The two input terminals of the multiplier are respectively connected to the reference The signal and the signal to be tested can obtain a high-frequency item and a low-frequency item, and then filter out the high-frequency item by a low-pass filter to obtain the phase difference between them, but this process will bring non-negligible noise and power consumption, thereby affecting the accuracy of the detection

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