Method for adjusting a stem equipped with an aberration corrector

An aberration corrector, HR-STEM technology, used in material analysis using radiation diffraction, discharge tubes, electrical components, etc., to solve problems such as limiting resolution

Active Publication Date: 2013-04-24
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This amount of time and the interpolation process typically results in a setting change (eg due to drift or thermal changes) such that aberrations again limit the resolution

Method used

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  • Method for adjusting a stem equipped with an aberration corrector
  • Method for adjusting a stem equipped with an aberration corrector
  • Method for adjusting a stem equipped with an aberration corrector

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Embodiment Construction

[0065] Examples of HR-STEM images and their representation in reciprocal space (Fourier space) are given eg in Figure 4 of the paper by Lupini mentioned earlier. Although Lupini uses the obtained representation in a different way, namely: for determining local magnification. In his off-axis representation (representation of the sub-image) in Fig. 4, a slight asymmetry can be observed. This would be expected for such off-axis images, but also demonstrates the utility of the invention.

[0066] The pattern of points in reciprocal space is the transformation of the crystal in reciprocal space ("Fourier space") convolved with the transformation of the beam diameter (probe profile) in reciprocal space ("Fourier space") .

[0067] The transformation of the crystal is the diffraction pattern, which extends to a large distance from the center of the diffraction pattern. For a perfect crystal with infinite size, it extends to infinity.

[0068] The transformation of the beam in rec...

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Abstract

The invention relates to a method for adjusting a C s corrector in a STEM using a crystalline sample. The method comprises recording a through-focus series, converting the obtained images to Fourier space, thus forming a set of images alike diffraction images. By then determining the symmetry of the Fourier images, the corrector can be tuned for better symmetry, and the transfer limit can be determined by determining the maximum distance of the spots from the centre. By repeatedly performing these steps, the corrector can be tuned to its optimum performance.

Description

technical field [0001] The invention relates to a method for adjusting a scanning transmission electron microscope (STEM) equipped with an objective lens and an aberration corrector for correcting the aberrations of the objective lens, the corrector being excited by excitation and the objective lens focusing to Focus value F. [0002] The invention further relates to a sample carrier for carrying out the method, and the use of such a sample carrier for carrying out the method according to the invention. Background technique [0003] As known to those skilled in the art, high-end STEMs are equipped with correctors for correcting the spherical aberration of the objective lens. Such a calibrator is available, for example, from CEOS Gmbh., Heidelberg, Germany (CEOS), and is integrated in a commercial STEM such as the Titan 80-300 from FEI, Hillsboro, Oregon, USA. [0004] Such STEMs are used to image samples, for example from crystalline materials. Such samples may be semicon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/28H01J37/22
CPCH01J37/153H01J2237/1534H01J37/28H01J2237/1532H01J2237/221H01J37/22H01J37/265H01J2237/216H01J37/20H01J2237/2802G01N23/20
Inventor M.比肖夫B.里格
Owner FEI CO
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