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A multi-station vacuum exhaust device for an infrared detector

An infrared detector and vacuum exhaust technology, which is used in pump devices, machines/engines, liquid variable capacity machines, etc. The effect of small difference and large number of workstations

Active Publication Date: 2015-07-29
无锡中科德芯感知科技有限公司
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  • Description
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  • Application Information

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Problems solved by technology

[0003] In the current exhausting devices used in infrared detectors, the exhausting table of single or several stations is mainly used for manual exhausting, the exhausting efficiency is low, the exhausting process between the stations affects each other, and the equipment is self-adaptive. poor ability

Method used

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  • A multi-station vacuum exhaust device for an infrared detector
  • A multi-station vacuum exhaust device for an infrared detector

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Embodiment Construction

[0014] Attached below figure 1 , 2 , the specific embodiment of the present invention is described in further detail:

[0015] Among them, the sealing valve of the main cavity, the front stage valve and the side pumping valve are the high vacuum pneumatic valve GE11 of VAT, the molecular pump adopts the turbomolecular pump TV551 of Agilent in the United States, and the gate valve adopts the ultra-high vacuum gate plate of Shenyang Keyi The valve CCQ-J, the mechanical pump adopts the American Agilent dry pump TRISCROLL300, and the vacuum gauge adopts the American Agilent integrated full range gauge FRG700. Flexible adapter CX is CF35 to VCR3 / 8 flexible joint, A, C, G flanges are CF35 flanges, B, D flanges are CF100, flanges are CF35 flanges, E, F flanges are KF25 flanges.

[0016] The main cavity in the exhaust device is used as the common vacuum chamber of the entire vacuum exhaust device, and 21 G flange external joints are evenly distributed on its circumference to divide ...

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Abstract

The invention discloses a multi-station vacuum air exhaust device for an infrared detector. The multi-station vacuum air exhaust device for the infrared detector comprises a main cavity body, a main cavity body sealing valve, a molecular pump, an inserting plate valve, a side drawing valve, a mechanical pump and a front-level pump. The main cavity body is a public vacuum chamber of the whole vacuum air exhaust device. A plurality of external connectors are distributed on the periphery of the main cavity body. The public chamber is divided into a plurality of air exhaust branches. Two air exhaust passages are arranged between the public vacuum chamber of the main cavity body and a pump unit. All the valves are ultrahigh vacuum pneumatic valves. The sealing form of the device is the metal sealing. The multi-station vacuum air exhaust device for the infrared detector is simple in structure and easy to dismantle and install. The number of the stations is many. High level of a vacuum degree can be achieved. Pressure difference of the main cavity body and the station is small. All the selected valves and the pump unit can be automatically controlled.

Description

technical field [0001] The invention relates to a vacuum device, in particular to a multi-station vacuum exhaust device for an infrared detector. Background technique [0002] The reliability requirements of infrared detectors for aerospace applications are high. During the production and development of detectors, some operations such as testing and testing are required for the products. In these processes, it is necessary to provide vacuum environments for infrared detectors. Generally, , the infrared detector is placed in the Dewar to obtain a vacuum environment, and the Dewar vacuum is obtained by an exhaust device. [0003] In the current exhausting devices used in infrared detectors, the exhausting table of single or several stations is mainly used for manual exhausting, the exhausting efficiency is low, the exhausting process between the stations affects each other, and the equipment is self-adaptive. poor ability. The invention provides a new type of multi-station e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B41/00
Inventor 曹岚张海燕朱宪亮庄馥隆季鹏陆华杰龚海梅
Owner 无锡中科德芯感知科技有限公司
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