Temperature control method and system for excimer laser

An excimer laser and temperature control system technology, applied in lasers, phonon exciters, laser parts and other directions, can solve the problems of insufficient temperature control ability and mutual influence of excimer lasers, and achieve high energy conversion efficiency and energy stability properties, and the effect of improving temperature stability

Inactive Publication Date: 2013-05-08
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0011] One of the technical problems to be solved by the present invention is that the temperature control capability of the current excimer laser is insufficient, and the problem of mutual influence between variables of the controlled object with multiple inputs and multiple outputs

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  • Temperature control method and system for excimer laser
  • Temperature control method and system for excimer laser
  • Temperature control method and system for excimer laser

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Embodiment Construction

[0027] As mentioned above, the excimer laser includes a discharge cavity, and the discharge cavity includes components such as discharge electrodes. The traditional temperature control system includes a heat exchange system and a cooling system. The heat exchange system is used to absorb the heat in the discharge chamber, and input the cooling water from the cooling system through the water inlet pipe, and output the heated water to the cooling system through the water outlet pipe, so as to discharge the heat out of the discharge chamber; the cooling system will be controlled by the heat exchange system The heated water output by the water outlet pipe is cooled, and the cooling water is output to the water inlet pipe of the heat exchange system, so as to circulate and input the cooling water to the heat exchange system.

[0028] As mentioned above, a flow regulating valve is installed on the water inlet pipe of the heat exchange system, and a temperature sensor is installed ins...

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Abstract

The invention discloses a temperature control method and a system for an excimer laser, wherein the excimer laser comprises a discharging cavity, a plurality of temperature detectors and a plurality of temperature control devices. When the discharging cavity works, heat is generated. The plurality of temperature detectors are used for detection of temperature at a plurality of positions relative to the temperature of the discharging cavity. The plurality of temperature control devices are used for cooling or heating the discharging cavity. Provided is a neural network proportion integration differentiation (PID) controller. The neural network PID controller receives temperature signals detected by a plurality of temperature sensors, and respectively regulates the temperature control devices according to the plurality of temperature signals, and enables the temperature of the discharging cavity to reach the required temperature. The temperature control method and the system for the excimer laser are capable of rapidly and accurately measuring the temperature of the discharging cavity of the excimer laser and capable of improving temperature stability of the system, and therefore higher power conversion efficiency and power stability of a laser are ensured.

Description

technical field [0001] The invention relates to the technical field of gas lasers, in particular to a laser temperature control system, in particular to an excimer laser temperature control method and system. Background technique [0002] Excimer lasers are pulsed gas lasers that work in the ultraviolet band. At present, the laser lithography technology used for large-scale integrated circuits breaks through 45nm resolution and is the mainstream choice for current lithography light sources. [0003] The discharge cavity is the core component of the excimer laser, mainly including the discharge electrode, gas circulation system and heat dissipation system. Its comprehensive operation performance determines the high-voltage discharge capability, laser output quality and overall operation efficiency of the laser. [0004] The performance of a laser system depends to some extent on the operating temperature of the discharge chamber. There is an optimum temperature range for the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/041
Inventor 张立佳吴晓斌赵江山丁金滨陈进新李慧刘斌崔惠绒周翊王宇
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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