Roots vacuum pump

A Roots vacuum pump and cavity technology, applied in the direction of pumps, pump components, rotary piston pumps, etc., can solve the problems of inability to use IC equipment, high power consumption, low ultimate vacuum, etc., and achieve long service life and energy saving. and space, reducing the effect of pulsating shock
CN103104489AActive Publication Date: 2013-05-15SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
Publication Date
2013-05-15

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Abstract

The invention relates to the technical field of vacuum pumps, and in particular relates to a roots vacuum pump. The vacuum pump comprises a motor, front and back bearing cavities, a roots cavity and a gear cavity, wherein the front and back bearing cavities are located at the both sides of the roots cavity, and the gear cavity is connected with the back bearing cavity; the roots cavity is provided with an air inlet and an air outlet and is internally provided with a driving rotor shaft and a driven rotor shaft; the driving rotor shaft and the driven rotor shaft are respectively and correspondingly provided with a roots driving rotor and a roots driven rotor; one end of the driving rotor shaft is connected with the motor, and the other end of the driving rotor shaft is provided with a driving gear; one end of the driven motor shaft is provided with a driven gear which is in transmission connection with the driving gear and accommodated in a gear box; and the front bearing cavity and the back bearing cavity are internally provided with bearings and bearing support rings which are sleeved and fixed at the both ends of the driving rotor shaft and the driven rotor shaft. The roots vacuum pump has the advantages of being small in size, high in pumping speed, energy-saving, space-saving, and applicable to IC equipment.
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Description

technical field

[0001] The invention relates to the technical field of vacuum pumps, in particular to a Roots vacuum pump. Background technique

[0002] Roots vacuum pumps evolved from Roots blowers, including high vacuum multistage Roots pumps, medium vacuum Roots booster pumps and dry Roots pumps with direct exhaust to the atmosphere. They are widely used in chemical industry, papermaking, metallurgy, film preparation, Food and other industries are also commonly used in the IC equipment industry as a vacuum pump. The research and manufacture of Roots vacuum pumps in China was earlier, but there are not many Roots dry pumps suitable for the strict requirements of the IC equipment industry, resulting in long-term dependence on imports for this equipment.

[0003] The air-cooled Roots dry pump meets many requirements of the IC equipment industry, such as high working temperature, long-term stable operation, low noise, simple maintenance, clean and oil-free, etc. It is a dry ...

Claims

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