Shakable L-shaped mesh-covered baffle
A net-wrapped, L-shaped technology, applied in the field of shakeable L-shaped net-wrapped baffles, can solve problems such as slag collapse and slag drop, increased product defect rate, and increased production costs, so as to avoid slag collapse and improve production Quality and production yield, the effect of quality assurance
Active Publication Date: 2015-05-20
吴江南玻华东工程玻璃有限公司
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Problems solved by technology
After using this type of L-shaped baffle for a period of time, due to the accumulation of slag on the surface, when the temperature and vacuum degree in the vacuum chamber change, it is easy to cause the phenomenon of slag collapse and slag drop, which can easily lead to the phenomenon of magnetron sputtering coating The products are damaged and become waste products, which seriously affects the production efficiency of the products, and also causes the increase of the production cost and the increase of the defective rate of the products.
Method used
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Embodiment Construction
[0008] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
[0009] see figure 1 , figure 2 Shown is a shakeable L-shaped baffle, which includes a first plate 1 and a second plate 2, both of which are made of stainless steel. A stainless steel mesh (not shown in the figure) is respectively wrapped on the outer periphery of the first plate body 1 and the second plate body 2, and its purpose is to improve the resistance of the first plate body 1 and the second plate body 2 to the magnetron sputtering. of adhesion. The first plate body 1 and the second plate body 2 are rotationally connected by a plurality of hinges 3, and these hinges are arranged at intervals along the length extension direction of the first plate body 1 and the second plate body 2, and the first plate body 1 and the second plate body 2 can be relatively rotated through the hinge 3 .
[0010] When the L-shaped mesh baffle is...
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The invention discloses a shakable L-shaped mesh-covered baffle. A first plate body and a second plate body of which the outside circumference parts are covered by stainless steel meshes are rotatably connected by arranging a hinge; after the L-shaped mesh-covered baffle is used in a vacuum cavity for a period of time, slag deposition formed on the stainless steel meshes through adhesion of magnetron sputtering materials reaches a certain degree, so that the first plate body and the second plate body relatively rotate by transferring driving power through a transmission component; and the first plate body and the second plate body relatively collide, so that the slap deposition on the stainless steel meshes falls down by hitting. Therefore, the slag deposition on the mesh-covered baffle is cleaned in a vacuum state; the phenomena of slap collapse and slap falling in the production process can be avoided; the quality of a magnetron sputtering coated product can be ensured; and the production quality and the production yield of the product can be improved.
Description
technical field [0001] The invention relates to a shakeable L-shaped netting baffle. Background technique [0002] In the prior art, in the vacuum chamber of magnetron sputtering coating, for the rotating target, an L-shaped baffle with netting is generally used to block the sputtering. This type of L-shaped baffle is usually composed of two vertically arranged The plate body is formed by wrapping stainless steel mesh again. After using this type of L-shaped baffle for a period of time, due to the accumulation of slag on the surface, when the temperature and vacuum degree in the vacuum chamber change, it is easy to cause the phenomenon of slag collapse and slag drop, which can easily lead to the phenomenon of magnetron sputtering coating Many products are damaged and become waste products, which seriously affects the production efficiency of the product, and also causes the increase of production cost and the increase of product defective rate. Contents of the invention ...
Claims
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IPC IPC(8): C23C14/35
Inventor 田富
Owner 吴江南玻华东工程玻璃有限公司