Film-coating tool for coating outer edge totally-closed zone

A fully enclosed, outer edge technology, used in sputtering coating, ion implantation coating, vacuum evaporation coating, etc., can solve problems such as inability to perform coating, and achieve elimination of film sedimentation, improvement of uniformity, and coating accuracy. high effect

Active Publication Date: 2015-04-08
ZHEJIANG LANTE OPTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The new type of magnetron sputtering coating substrate fixture shields the edge part, and the coating of the outer edge fully enclosed belt cannot be carried out.

Method used

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  • Film-coating tool for coating outer edge totally-closed zone
  • Film-coating tool for coating outer edge totally-closed zone
  • Film-coating tool for coating outer edge totally-closed zone

Examples

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Embodiment Construction

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are explanations of the present invention and the present invention is not limited to the following examples.

[0019] see Figure 1 to Figure 3 , this embodiment includes a backbone frame 4 and three supporting and fixing frames 5 for coated sheets, six erection units are arranged on the backbone frame 4, and the six erection units are arranged in a form of 2×3.

[0020] An erection unit in this embodiment includes a shielding sheet 1 , a shielding sheet fixing beam 2 , and a reference positioning support point 3 for the film to be coated.

[0021] In this embodiment, each erection unit corresponds to two shielding sheet fixed beams 2, and the two shielding sheet fixed beams 2 are arranged in parallel. On the coating surface, the shielding sheet 1 is provided with four fixing holes, the shielding sheet 1 is fixed with the s...

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Abstract

The invention relates to a film-coating tool for coating an outer edge totally-closed zone, and is mainly suitable for the technical field of magnetic-control sputtering film-coating equipment. The film-coating tool comprises a main frame, wherein the main frame is provided with at least one erection unit used for erecting a substrate; the erection unit comprises a shielding sheet, a shielding sheet fixing beam and a film-coated sheet supporting and fixing frame; both ends of the shielding sheet fixing beam are fixed on the main frame; the shielding sheet is fixed with the shielding sheet fixing beam through a fixing hole; the film-coated sheet supporting and fixing frame is positioned at the same side of the film-uncoated surface of the main frame; one end of the film-coated sheet supporting and fixing frame is movably connected with the main frame through a rotating shaft; and a circle of gap is positioned between the edge of the shielding sheet and the edge of the erection unit. The film-coating tool disclosed by the invention has the advantages of reasonability in structural design, convenience for use, high film-coating accuracy, accurate film-forming position, clear edge without a shadow and lower cost, can realize that the outer edge totally-closed zone is coated and can be used for coating the outer edge totally-closed film-coating zone in any shape.

Description

technical field [0001] The invention relates to a coating tooling, in particular to a coating tooling for coating outer edge fully enclosed belts, which is mainly applicable to the technical field of magnetron sputtering coating equipment. Background technique [0002] At present, magnetron sputtering coating is a branch of PVD coating method. This coating method refers to the bombardment of the target with ionized inert gas ions in a vacuum environment through the joint action of voltage and magnetic field. The material is ejected in the form of ions, atoms or molecules and deposited on the substrate to form a thin film. Due to the technology of the magnetron sputtering coating machine, the processing temperature of the film forming process is low, and the instantaneous temperature does not exceed 200 ° C. It has high bonding strength and does not pollute the environment. It is widely used in the coating of automotive mirrors, mobile phone panels, and automotive interior an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/35
Inventor 赵礼李志忠
Owner ZHEJIANG LANTE OPTICS
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