Multicolor confocal microscopy system and signal processing method thereof

Abstract

The invention provides a multicolor confocal microscopy system and a signal processing method thereof. A first optical fiber module is used for modulating light provided by a light source into detection light, a plurality of sub-dispersion light fields are formed through a dispersion objective lens, and then the sub-dispersion light fields are focused on a to-be-tested object. Object detecting light reflected by the to-be-tested object form filter light through a second optical fiber module conjugated with the first optical fiber module. The filter light is subjected to light splitting and then is respectively projected to a group of color sensing units to respectively sense two filter light beams formed by light splitting, and accordingly two groups of three-color light intensity signals which are dislocated with each other in focus positions are respectively formed. The two groups of three-color light intensity signals are computed to obtain three intensity signal proportions respectively corresponding to different kinds of color light. The appearance shape corresponding to the to-be-tested object is obtained according to the maximum intensity signal proportion and a depth relation curve. The multicolor confocal microscopy system can obtain appearance outline information of the to-be-tested object, and meanwhile high-analysis effect with single-point co-focus is achieved.

Description

technical field [0001] The present invention is a kind of color confocal microscopy technique, which refers to a kind of color confocal microscopy system and its signal processing method. Background technique [0002] The traditional color confocal microscope system is generally set up on the desktop to scan vertically or horizontally to detect the surface topography of the object to be tested. Due to the large size of the system and the problem of occupying space, it is easy to cause inconvenience. If the angle of the object to be measured is too large or the volume is too large, it will be limited to measure with a desktop structure. For example, if it is desired to measure the bump height of a large scale integrated circuit (LSI) chip formed on a large 8-inch chip, the structure of the model cannot be changed in real time, thus greatly reducing its practicability. [0003] In the prior art, for example, the US publication US. Pub. No. 2004 / 0051879 discloses a confocal di...

AI Technical Summary

Problems solved by technology

However, in this technology, the problem that will be faced is that as the reflectivity of the surface of the object to be tested is different for the three colors of RGB, it is necessary to establish a depth relationship curve corresponding to the reflectivity of different colors, so it is quite inconvenient for the inspectors

In addition, since most of the structure of receiving object light in the prior art uses the structure of slits, it often overlaps with out-of-focus light and stray light to generate useless information of cross talk, thus losing the image analysis effect

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