Accuracy compensation method of coaxial macro-micro composite linear motion platform device

Abstract

The invention discloses a coaxial macro-micro composite linear motion platform device and an accuracy compensation method of the coaxial macro-micro composite linear motion platform device. The coaxial macro-micro composite linear motion platform device comprises a macro motion device, a micro motion device, a control device and a location detection device, wherein the macro motion device is composed of a servo driver, a straight line drive module, a straight line guide rail, a base and a macro moving working platform. The micro motion device is composed of a piezoelectric ceramic driver or a voice coil motor and a flexible hinge amplifying mechanism. The flexible hinge amplifying mechanism is composed of a flexible hinge, a micro motion working platform and a frame. The piezoelectric ceramic driver or the voice coil motor drives the flexible hinge amplifying mechanism to drive the micro motion working platform to generate displacement. The location detection device detects displacement information of a macro-micro motion working platform in real time and sends the displacement information to the control device. The control device drives the micro motion working platform to compensate motion of the macro motion device in real time according to detection information of a macro-micro motion displacement sensor, and thus high static accuracy and high dynamic accuracy of the coaxial macro-micro composite linear motion platform device are achieved.

Description

technical field [0001] The invention relates to an accuracy compensation method for a coaxial macro-micro composite linear motion platform device. Background technique [0002] With the development of society and the improvement of people's living conditions, people's requirements for products are getting higher and higher, which requires the manufacturing industry to continuously improve the processing accuracy of products. However, the range of high-precision feed motion platforms is generally short, and the accuracy of large-scale ordinary macro motion feed platforms cannot meet actual needs. If a dedicated large-scale high-precision motion platform is used, the manufacturing cost of the product will increase significantly. [0003] In view of the above-mentioned status quo, a motion platform that can realize large-scale and high-precision feeding, which can combine large-scale general-precision macro-motion and high-precision small-scale micro-motion, is more and more p...

AI Technical Summary

Problems solved by technology

The above-mentioned positioning device and method have achieved precise positioning of the PCB board, but the positioning device and method still have the following deficiencies: (1) The device uses a lead screw to drive the macro-motion platform to generate displacement, and the inherent crawling phenomenon of the lead screw itself It will cause a large displacement amplitude of the macro-moving platform from motion to rest, and it takes a long time to reach a stable process

However, in this solution, the grating ruler and the micro-motion sensor are used as the position accuracy detection in the coaxial direction, which requires that the grating ruler and the micro-motion sensor must achieve matching accuracy, resulting in increased costs and complicating the accuracy compensation method; The scheme uses air-floating guide rails, linear motors and other components, resulting in high cost and poor economy of the motion platform device, which limits its promotion scope

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