Power distribution cabinet special for semiconductor device
A technology of power distribution cabinets and semiconductors, which is applied in the field of electronic equipment, can solve the problems that the remote monitoring and control of power distribution cabinets cannot be realized, and cannot meet the requirements, so as to improve the power supply efficiency and meet the power distribution needs.
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[0022] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0023] Such as figure 1 As shown, a special power distribution cabinet for semiconductor equipment includes an on-off control device for realizing the on-off of the power distribution output of the power distribution cabinet, and the power distribution cabinet also includes:
[0024] A parameter monitoring module, configured to monitor the operating state of the power distribution cabinet;
[0025] A field bus communication module, used to realize the real-time communication function between the electrical equipment and the control module;
[0026] The control module is respectively connected with the field bus communication module, the on-off control device and the parameter monitoring module, and is used to send a control command to the corresponding on-off control device according to the control command received by the field bus communication modu...
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