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Hybrid diffraction grating, mold and method for manufacturing diffraction grating and mold

A manufacturing method and diffraction grating technology, applied in the field of mold and manufacturing, can solve the problems of stray light signal affecting signal, increase of diffraction grating error, unusable diffraction grating, etc., to achieve the effect of reducing cost and reducing waste

Inactive Publication Date: 2016-05-04
OTO PHOTONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As another example, serious stray light signals may be generated and affect the desired signal
Worse, it may render the diffraction grating unusable
[0007] Based on the above, the processing method of the traditional diamond knife will cause a positioning problem every time the tool is replaced, and the error of the diffraction grating will also increase accordingly.

Method used

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  • Hybrid diffraction grating, mold and method for manufacturing diffraction grating and mold
  • Hybrid diffraction grating, mold and method for manufacturing diffraction grating and mold
  • Hybrid diffraction grating, mold and method for manufacturing diffraction grating and mold

Examples

Experimental program
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Effect test

no. 1 example

[0106] Figure 5A A schematic diagram showing a diffraction grating according to a first embodiment of the present invention. Please refer to Figure 5A , in this embodiment, the hybrid diffraction grating 100 is a planar grating, which has 1000 diffraction structures 101 , 1000 diffraction structures 102 and 1000 diffraction structures 103 . The diffraction structures 101, 102, 103 have different blaze angles A1, A2, A3 respectively. The diffraction structures 101, 102, 103 are regularly arranged, and the order of the diffraction structures in one section is 103-101-102-103-101-102-103-101-102, and the diffraction structures 101, 102, 103 have the same pitch P1, and the effective surfaces 101E, 102E, 103E of the diffraction structures 101, 102, 103 are all planes. The connection interface between different diffraction structures 103 and 101 (or 102 and 101; or 103 and 102) can be referred to as a heterogeneous connection part, while the connection interface between the sam...

no. 2 example

[0120] In the first embodiment, although the blaze angle of the diffraction structure of the profile diagram is described by taking the periodicity A3-A1-A2-A3-A1-A2-A3-A1-A2 as an example, it is only an optional implementation example. The present invention is not limited thereto. In other embodiments, those skilled in the art can change the arrangement of the diffraction structures according to their needs. for example, Figure 7 A schematic diagram showing a contour map according to a second embodiment of the present invention. Such as Figure 7As shown, the arrangement of the blaze angles in the contour diagram 210 is A2-A1-A2-A3-A2-A3-A1-A3-A1..., which is a non-periodic arrangement. According to the contour diagram 210 and the manufacturing method of the first embodiment, a corresponding diffraction grating can be manufactured.

[0121] In the first embodiment, the arrangement of the blaze angles of the contour diagram 110 is A3-A1-A2-A3-A1-A2-A3-A1-A2, which is equ...

no. 3 example

[0124] In the first embodiment, although three blaze angles A1 , A2 , A3 of the same number are used as an example to describe the blaze angles of the diffraction structure in the profile diagram, it is only an optional embodiment. The present invention is not limited thereto. In other embodiments, those skilled in the art can change the quantities of the blaze angles A1 , A2 , A3 according to their requirements. for example, Figure 8 A schematic diagram showing a contour map according to a third embodiment of the present invention. in accordance with Figure 8 The contour diagram 310 of the first embodiment and the manufacturing method of the first embodiment can manufacture a corresponding diffraction grating. Such as Figure 8 As shown, the number of blaze angles A1 in the contour map 310 is 2, the number of blaze angles A2 is 3, and the number of blaze angles A3 is 4. In the third embodiment, the ratio of the blaze angle A3 is the highest, so that the overall diffrac...

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Abstract

A hybrid diffraction grating, a mold used to produce the hybrid diffraction grating, and their manufacturing methods are described. In one aspect, a hybrid diffraction grating comprises a grating main body and a reflective layer. The grating main body comprises numerous diffraction structures. When viewed along a top-view direction, the numerous diffraction structures are arranged in a pattern defined by a profile. The profile determines various blaze angles of the numerous diffraction structures. The reflective layer, disposed on the diffraction structures, exhibits characteristics of the numerous diffraction structures.

Description

technical field [0001] The invention relates to a diffraction grating, in particular to a diffraction grating for light splitting and its corresponding mold and manufacturing technology. Background technique [0002] Spectrometers are used in a wide range of applications, such as photometry of radiation sources, spectrometers, and substance detection. The spectrometer will use a slit structure to control a certain amount of light source to enter it, and then focus the output spectral components on an image plane through a combination of a diffraction grating and a collimator (collimator) and a correcting lens (correcting lens). Light sensors can be placed on the image plane so that individual spectral components can be obtained. [0003] figure 1 A schematic diagram showing a conventional spectrometer. Such as figure 1 As shown, the traditional spectrometer 5100 is composed of a light source 5110 , an input unit 5120 , a collimating mirror 5130 , a planar grating 5140 , ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
CPCG02B5/1809G02B5/1852G02B5/1857
Inventor 柯正浩
Owner OTO PHOTONICS