Chip carrier
A technology of loading table and chip, which is applied in the field of plasma technology, to achieve the effect of simplifying the uniform gas structure, avoiding process unevenness, and maintaining the vacuum degree
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[0029] In order to deeply understand the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0030] See attached figure 1 The slide table provided by the present invention includes a chamber 6 , a chamber upper cover 5 , electrodes 4 , a chip fixing plate 1 , a fixing plate support ring 3 and a support plate 7 , and an air outlet 9 is opened at the bottom of the chamber 6 . The chamber upper cover 5 is installed on the chamber 6 , and the chamber upper cover 5 is provided with an air inlet 8 , and the chamber upper cover 5 is attached with an electrode 4 at the lower part of the air inlet 8 . The support disc 7 is annular, and the center of the support disc 7 is provided with a first through hole 10 , and the support disc 7 is installed on the inner side wall of the chamber 6 . The support ring 3 of the fixed disc is installed on the support disc 7 , and the support ring 3 of the ...
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