The invention relates to an
electron beam
exposure machine film clip
library system with encoding identification, which is composed of a Z-direction motion stage, a
film frame which is used for placing film clips, a gear box, an ascending and descending stage and a
computer control system, a
drive motor drives a gear in the gear box to rotate under the control of the
computer control system, thus driving the Z-direction motion stage to do the Z-direction motion and allowing the
film frame to do the Z-direction motion, the film clips on the
film frame are driven to move upward or downward to the film receiving position of a
valve port, the film clips are selectively sent to a film carrying stage for carrying out the
exposure, at this time, the
valve port and a door of the film clip
library are closed simultaneously, the
valve port is opened after the completion of the
exposure of one film clip, then the film clip is retaken to the film clip
library for preservation, and the exposure valve port is immediately closed; the
computer control system further controls the Z-direction motion stage to move upward or downward to the position of the next film clip which needs to be exposed, then the valve port is opened again to carry out the exposure of the next film clip, and the process revolves like this till the film clips are completely exposed. The
electron beam exposure
machine film clip library system shortens the time of sending and taking the films, improves the positioning precision of sending and taking the films and ensures the exposure quality of the film clips.