Method and system for vacuuming control of ito-pvd equipment
An ITO-PVD, vacuuming technology, applied in the semiconductor field, can solve the problems of unfavorable production and processing and high equipment cost
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[0075] In order to make the purpose, technical solution and advantages of the present invention clearer, the specific implementation of the method and system for vacuuming control of ITO-PVD equipment of the present invention will be described below with reference to the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0076] A kind of ITO-PVD equipment vacuum control method of the embodiment of the present invention, such as figure 1 shown, including the following steps:
[0077] S100, setting the transmission chamber in the ITO-PVD equipment as the default chamber of the system dry pump, and not configuring the cold pump, and configuring the cold pump for the ITO process chamber. Different from the traditional equipment configuration, the transfer chamber is not equipped with a cold pump, but the transfer chamber is set as the default chamber of t...
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