Electron-beam exposure device film jacket library system
A technology of electron beam exposure and film holder, which is applied in microlithography exposure equipment, photolithography exposure device, electrical program control, etc., can solve the problems of low production efficiency, poor positioning accuracy of taking and placing film holders, etc., and achieve easy operation , Easy to install and adjust, to ensure the effect required by the vacuum degree
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[0023] Such as figure 1 , 2 As shown in, 13, and 14, the present invention is composed of a Z-direction motion table 11, a film holder 12 for placing film clips, a gear box 13, a lifting table 14, a code recognition component 15, and a computer control system 16. The Z-direction motion table 11, the film rack 12 and the code recognition assembly 15 are located in the film folder library 17. The film rack 12 is placed on the Z-direction motion table 11 during operation. The code recognition assembly 15 is installed inside the film folder library 17, and the film folder library There is an exposure valve port 18 on one side of 17. When the Z-direction motion table 11 moves up and down, the code recognition assembly 15 can identify the position of the exposure valve port 18 facing the Z-direction motion table 11, so that it can accurately identify which layer of the film holder 12 the exposure valve port 18 is located in. Position; It can also accurately identify when the Z-directio...
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