Prism beam expanding device

A prism and platform technology, applied in the field of prism beam expander, can solve problems such as complex structure and difficult installation and adjustment

Inactive Publication Date: 2013-08-07
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the structure of the device is complicated, and it is difficult to install and adjust in the line width narrowing module with limited space

Method used

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Examples

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Embodiment Construction

[0019] see figure 1 , figure 1 It is a schematic diagram of the prism beam expander of the present invention, which is composed of a prism 1 , a prism bead 2 , a prism platform 3 , a rotating platform 4 and a platform pole 5 . The positional relationship of the above parts is as follows:

[0020] The prism 1 is fixed on the prism platform 3 through the prism pressing plate 2 , the bottom of the prism platform 3 is fixed with the rotary table 4 , and the rotary table 4 is fixed on the top of the platform pole 5 . Prism Platform 3 at θ x , θ y The two dimensions are adjustable in pitch, the height (z direction) of the platform pole 5 is adjustable, and the prism platform as a whole can do θ around the platform pole 5 z direction of rotation. For the adjustment dimensions mentioned above, please refer to figure 2 .

[0021] The prisms 1 are rectangular prisms, the number of which is 3 or 4, arranged in sequence according to a certain angle of incidence, and fixed on the p...

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Abstract

The invention discloses a prism beam expanding device, which consists of a prism, a prism pressing plate, a prism platform, a rotary table and a platform supporting rod, wherein the prism is fixedly arranged on the prism platform through the prism pressing plate; the prism platform is fixed to a rotating shaft of the rotary table; the platform supporting rod is fixed to a pedestal of the rotary table; and the entire prism platform is driven by the rotary table to rotate within a certain angle range by taking the platform supporting rod as an axis. The two-dimensional pitch of the prism is adjustable, and the height of the platform supporting rod is adjustable. The device is mainly used in a line-width reduction module of an excimer laser or a dye laser. The prism beam expanding device is characterized in that accurate adjustment can be realized in four dimensions so as to quickly and efficiently adjust the prism light path. In addition, the line width of the laser spectrum can be finely adjusted within a certain range by adjusting the angle between the light beam and the prism platform.

Description

technical field [0001] The invention discloses a prism beam expander. The device is mainly used in the line width narrowing module of excimer laser or dye laser. It is characterized by precise adjustment in four dimensions, so that the prism light path can be adjusted quickly and efficiently. In addition, by adjusting the angle between the beam and the prism platform, the linewidth of the laser spectrum can be fine-tuned within a certain range. Background technique [0002] Narrow linewidth excimer lasers for lithography generally use a combination of prisms and echelle gratings to narrow the linewidth. The role of the prism group is to realize the one-dimensional beam expansion of the laser, while the grating realizes narrow linewidth wavelength selection and feedback amplification. As the carrier of the prism, the prism beam expander is an important part of the laser line width narrowing module. The optimal design and adjustment of the prism beam expander have an import...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/18G02B27/09
Inventor 袁志军张海波周军耿立明楼祺洪魏运荣
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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