Broadband large size plane grating diffraction efficiency tester
A flat grating and diffraction efficiency technology, applied in the field of spectroscopy, can solve the problems that the grating diffraction efficiency tester cannot measure the grating diffraction efficiency and cannot realize the measurement of the full-aperture diffraction efficiency of a large-scale grating.
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[0013] Specific implementation mode 1. Combination figure 2 and image 3 Description of this embodiment, a broad-band large-size planar grating diffraction efficiency tester, including a light source system, a pre-monochromator, a measuring monochromator, a detection system and a controller 17; the light source includes a tungsten lamp 1, a deuterium lamp 2. The first plane reflector 19, the second plane reflector 20 and the condenser 3; the front monochromator includes the first incident slit 4, the first concave collimator 5, the splitting grating group 23, and the first turntable 22. A first concave imaging mirror 21, a first exit slit 24, and a pre-monochromator housing 8; the measuring monochromator includes a second entrance slit 9, a second concave collimator mirror 10, and a second turntable 26. The second concave imaging mirror 27, the second exit slit 28 and the measuring monochromator housing 18; in the light source system outside the front monochromator housing 8...
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