Symmetrical out-focus type axial high-resolution confocal microimaging device

Abstract

A symmetrical out-focus type axial high-resolution confocal microimaging device belongs to the fields of optical accurate measurement. The symmetrical out-focus type axial high-resolution confocal microimaging device comprises a lighting light path and a detecting light path. The lighting light path is that a light beam emitted by a laser can be aligned by an alignment lens set to parallelly penetrate through a polarizing beam splitter and a 1 / 4 lambda water plate to be converged by a focus microscope objective on an article to be tested. The detecting light path is that the light beam reflected by the article to be tested passes through the focus microscope objective and the 1 / 4 lambda wave plate to be reflected by the polarized beam splitter on a 1:1 ordinary beam splitter. A reflecting light path and an incident light path of the 1:1 ordinary beam splitter are both provided with detecting light paths to achieve detection of two light beams. The symmetrical out-focus type axial high-resolution confocal microimaging device is equal to a differential confocal microtechnique. Furthermore, the out-focus amount can be set accurately to enable the systematical axial resolution capability to be optimal, and meanwhile, complex pinhole symmetrical out-focus adjustment is removed.

Description

technical field [0001] A symmetrical focus-shifting axial high-resolution confocal microscopic imaging device belongs to the field of optical precision measurement, and in particular relates to a symmetrical shifting focus type confocal microscopic imaging method. Background technique [0002] As a three-dimensional imaging method with non-contact and high axial resolution, laser confocal microscopy has been widely used in the field of optical precision measurement. The value of applications is also increasing. [0003] In confocal microscopy technology, scholars at home and abroad have done a lot of research on how to improve the three-dimensional imaging capabilities of confocal microscopy systems. The methods can be divided into two categories: one is to introduce various super-resolution pupil filter components to achieve Break through the diffraction limit and improve the resolving power of the confocal microscopy method, such as using a phase filter, a complex amplitu...

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Problems solved by technology

However, because the position of the detection pinhole plays an important role in improving the resolution of the confocal system in this method, it is difficult to accurately adjust the position of the pinhole in practical applications, and the two detection pinholes cannot be located at the best position, thus making its performance Difficult to achieve optimal

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