Three-degree-of-freedom displacement measurement method of moving coil planar motor mover
A plane motor, degree of freedom technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of high requirements for the use environment, difficult to ensure simple and fast signal processing, and large impact on measurement accuracy.
Active Publication Date: 2015-12-23
TSINGHUA UNIV +1
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Problems solved by technology
Using a two-dimensional grating to measure the motion of a planar motor mover requires installing a larger planar grating on the planar motor mover to generate an optical signal with displacement information to communicate with the optical sensor. In order to prevent the scale surface of the grating from being polluted, There are high requirements for the use environment; laser position sensors are used to measure the displacement of planar motor movers through laser triangulation or echo analysis principles. The measurement accuracy is greatly affected by the environment. Signal processing is hard to keep simple and fast
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[0029] Taking a moving coil planar motor driven by four sets of coil arrays as an example, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.
[0030] figure 1 It is a schematic diagram of the three-degree-of-freedom displacement measurement system of the planar motor mover of the present invention, including No. 1 eddy current sensor 10, No. 2 eddy current sensor 11, No. 3 eddy current sensor 12, No. 1 absolute linear grating 14, and No. 2 absolute linear grating 17 and signal processing systems;
[0031] The first coil array 1 and the third coil array 3 are distributed along the x-direction, providing x-direction thrust for the planar motor; the second coil array 2 and the fourth coil array 4 are distributed along the y-direction, providing y-direction thrust for the planar motor. The cables for powering the coils are connected to the L-shaped cable platform 8 , and the L-shaped cable platform 8 is...
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A method for measuring the three-freedom-degree displacement of a movable coil type plane motor active cell comprises three electrical vortex sensors, two absolute linear gratings and a signal processing system. According to the measured values of the three electrical vortex sensors and the measured value of an absolute linear grating I, the three-freedom-degree displacement of the plane motor active cell in a cable table coordinate system is solved; then according to the measured value of an absolute linear grating II, the transfer matrix of the cable table coordinate system and a base table coordinate system is solved; then the three-freedom-degree displacement of the plane motor active cell in the base table coordinate system is solved; further, the coordinate of any coil center of a plane motor in the base table coordinate system is solved. The method for measuring the three-freedom-degree of the plane motor active cell is simple in structure, high in measuring accuracy, high in responding speed and capable of satisfying the requirements for large-stroke horizontal linear displacement measurement.
Description
technical field [0001] The invention relates to a three-degree-of-freedom displacement measurement method of a planar motor mover, in particular to a three-degree-of-freedom displacement measurement method for a moving-coil planar motor mover. Background technique [0002] Precision displacement measurement technology is closely related to the development level of VLSI (IC) manufacturing and packaging, ultra-precision machining, micro-electromechanical system (MEMS) assembly and integration, optical instruments, cell manipulation, nanomaterial manufacturing, bioengineering, etc. high-tech. The precise measurement of multi-degree-of-freedom displacement (including linear displacement and angular displacement) has gradually become the latest research field. [0003] In two-dimensional positioning processing devices, especially modern semiconductor micro-processing equipment and other ultra-precision processing equipment, high-precision motion is usually realized by planar mot...
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IPC IPC(8): G01B11/02
Inventor 朱煜张鸣李敏杨开明蒋毅余东东李鑫穆海华
Owner TSINGHUA UNIV