Method for recycling the carbon-chuck for manufacture of polycrystalline silicon

A polysilicon and graphite technology, which is applied in the field of reuse of graphite chucks for polysilicon manufacturing, can solve problems such as being unsuitable for semiconductors or solar cells, and achieve the effects of effective reuse and improved economy.

Inactive Publication Date: 2013-09-18
APOLLO TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the purity of metal silicon produced at this time is about 98%, and it contains various impurities such as Re, Al, Ca, Cr, Mn, B, Cu, etc., so it is not suitable for direct use as a raw material for semiconductors or solar cells

Method used

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  • Method for recycling the carbon-chuck for manufacture of polycrystalline silicon
  • Method for recycling the carbon-chuck for manufacture of polycrystalline silicon
  • Method for recycling the carbon-chuck for manufacture of polycrystalline silicon

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Embodiment Construction

[0028] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0029] The method for reusing the graphite chuck for polysilicon manufacturing according to the present embodiment includes the following steps.

[0030] First, a step ( S100 ) of separating the graphite chuck-polysilicon end from the silicon ingot is performed. In this embodiment, the graphite chuck-polysilicon end (Carbon chuck-PolySilicon End) refers to the graphite chuck used in the polysilicon manufacturing process in the above-mentioned Siemens reactor, which can be obtained from image 3 It was confirmed that it was in a state where polysilicon was attached on its outer surface.

[0031] The specific technique for separating the above-mentioned graphite chuck-polysilicon end from the grown silicon ingot is generally substantially the same as the process used in the polysilicon manufacturing process, and thus a detailed description...

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Abstract

The invention provides a method for recycling the carbon-chuck for manufacturing polycrystalline silicon. The method is characterized in that by effectively separating the polycrystalline silicon which is plated on the carbon-chuck through vapor deposition, the polycrystalline silicon is recycled and the carbon-chuck which is used in the procedure of manufacturing polycrystalline silicon is recycled as well. The method for recycling the carbon-chuck for manufacture of polycrystalline silicon comprises steps of separating carbon-chuck- polycrystalline silicon end-with polycrystalline silicon attached on and putting the carbon-chuck- polycrystalline silicon end into a separate medium to react.

Description

technical field [0001] The present invention relates to a method for reusing graphite chucks for polysilicon production, and more specifically, to a method as follows: by effectively separating the polysilicon vapor-deposited on the surface of graphite chucks used in the polysilicon manufacturing process, not only for The evaporated polysilicon is reused and the graphite chuck is also reused. Background technique [0002] In the manufacture of semiconductors or solar cells, polysilicon (Poly Silicon) is used as its raw material, so the demand for high-purity polysilicon of 99.9999999% to 99.99999999% suitable as semiconductor or solar cell raw materials is increasing, which is in the comprehensive development of the electronics industry occupies an important part. [0003] To summarize the manufacturing process of the above-mentioned polysilicon, first, quartz sand or silica (SiO 2 ) as a raw material, melted in an electric furnace, and reduced with carbon to obtain metal ...

Claims

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Application Information

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IPC IPC(8): C01B33/035
CPCC01B32/21C01B33/02B09B3/00Y02W30/50
Inventor 金钟济
Owner APOLLO TECH
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