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Method for manufacturing high-density large-scale micro-nano-structure array

A micro-nano structure, high-density technology, applied in the direction of cells, electrolytic processes, electrolytic components, etc., can solve problems such as low efficiency and yield, technical and cost problems, achieve manufacturing difficulty and cost reduction, improve manufacturing efficiency, expand The effect of material complexity and functional diversity

Active Publication Date: 2013-09-25
宁波微极电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Practical high-density large-scale micro-nano structure arrays (such as high-density probes, etc.) often contain more than tens of thousands of individual micro-nano structures. Using a single micro-electrolysis catheter to manufacture such a large array has high efficiency and yield. Low
However, the high-density large-array micro-electrolysis catheter with the same proportion as the target array is directly used to make the micro-electrolysis catheter template to manufacture a high-density large-scale micro-nano structure array at one time, although the manufacturing efficiency is very high (the entire array can be manufactured at one time. ), but will encounter technical and cost difficulties in the manufacture of high-density large array microelectrolytic catheter templates

Method used

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  • Method for manufacturing high-density large-scale micro-nano-structure array
  • Method for manufacturing high-density large-scale micro-nano-structure array

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Embodiment 1

[0023] Manufacture a high-density large-scale micro-nano structure array composed of (n×N)×(m×M) micro-nano structures, the N and M are both integers between 3-500, and the n and m are both 1 Integers between -100, the N is the number of micro-electrolysis catheters arranged horizontally in the micro-electrolysis catheter array, and the M is the number of vertically-arranged micro-electrolysis catheters in the micro-electrolysis catheter array; the high-density large-scale micro-nano In the structure array, the spacing between adjacent micro-nano structures in the horizontal row is d1, and the spacing between adjacent micro-nano structures in the vertical row is d2, and the dimensions of d1 and d2 are 5nm-20μm:

[0024] 1) combine Figure 1-Figure 5 , providing a mounting substrate 2 with a rectangular array of plane mounting holes, the number of plane mounting holes 3 in the rectangular array of plane mounting holes is equal to N×M, and in the rectangular array of plane mount...

Embodiment 2

[0027] Manufacture a high-density large-scale rectangular array of columnar micro-nano structures consisting of (3×3)×(1×3) columnar micro-nano structures, where the spacing between adjacent columnar micro-nano structures in the vertical row is 2 μm, and the adjacent columnar micro-nano structures in the horizontal row The pitch of the columnar micro-nano structure is 1 μm:

[0028] 1) combine Figure 1-Figure 5 , providing a mounting substrate 2 with a rectangular array of planar mounting holes, the number of planar mounting holes 3 in the rectangular array of planar mounting holes is equal to 3×3 (that is, 9), wherein the spacing between adjacent mounting holes 3 in a vertical row Set to 2 μm, the distance between adjacent mounting holes 3 in the horizontal row is set to 3 μm, the thickness of the mounting substrate 2 is 350 μm, and the mounting substrate 2 is prepared by the micro-electromechanical system (MEMS) processing method of the prior art , providing 3×3 microelect...

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Abstract

The invention discloses a method for manufacturing a high-density large-scale micro-nano-structure array. The method comprises the steps that: (1) a low-density micro-electrolysis catheter array template composed of N*M micro-electrolysis catheters is prepared; (2) the low-density micro-electrolysis catheter array template prepared in the step (1) is arranged on a micro-electrolytic deposition system; the electro-deposition growth of the micro-electrolysis catheters on a conductive substrate are controlled, such that a high-density small-scale micro-nano-structure array with n micro-nano-structures on a row with a space of d1 between adjacent micro-nano-structures and with m micro-nano-structures on a column with a space of d2 between adjacent micro-nano-structures is formed. Micro-electrolysis catheters on the entire N*M micro-electrolysis catheter array work synchronically, such that the high-density large-scale micro-nano-structure array formed by (N*N)*(m*M) micro-nano-structures can be manufactured. With the method, the high-density large-scale micro-nano-structure array can be manufactured with low cost and high efficiency.

Description

technical field [0001] The invention relates to the field of manufacturing micro-nano materials, in particular to a method for manufacturing high-density large-scale micro-nano structure arrays. Background technique [0002] The micro-nano structure array is a kind of material structure arranged in a micron or nanometer scale. The material can be metal, ceramic, semiconductor or organic material, and has specific electrical, magnetic, optical and mechanical properties and functions. It is used in various Integrated circuit and optoelectronic chip manufacturing, testing and medical probe field. The micro-nano structure array referred to in the present invention specifically refers to metal, semiconductor or ceramic structures of various shapes arranged in an orderly manner in a plane. [0003] Micro-area electrolytic deposition technology is a micro-nano processing technology based on scanning probe technology (SPT). Its principle is to use a micro-electrolytic catheter with...

Claims

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Application Information

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IPC IPC(8): C25D7/00C25D5/02C25D5/04C25D17/00C25D21/12
Inventor 俞敏莉郑建红李立峰
Owner 宁波微极电子科技有限公司
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