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Polarization rotator based on asymmetric vertical slot waveguide

A polarization rotator and slit waveguide technology, applied in the field of integrated optics, to avoid the problem of precise alignment and avoid loss

Inactive Publication Date: 2013-10-02
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The polarization rotator based on various waveguide shapes mainly breaks the symmetry of the material or geometric shape of the waveguide through secondary processing on the waveguide, thereby generating mixed modes in the waveguide to achieve mode conversion, but generally requires multiple times. Etching or wet etching to realize the waveguide structure

Method used

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  • Polarization rotator based on asymmetric vertical slot waveguide
  • Polarization rotator based on asymmetric vertical slot waveguide
  • Polarization rotator based on asymmetric vertical slot waveguide

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Embodiment Construction

[0015] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0016] figure 1 It shows the top structural view and working process of the polarization rotator in the present invention. Such as figure 1 As shown, the polarization rotator consists of:

[0017] The waveguide 1 at the incident end is used to introduce externally incident light;

[0018] Mode conversion waveguide 2, which is used to convert the incident light of TE / TM mode into the outgoing light of TM / TE mode;

[0019] The waveguide 3 at the exit end is used to guide out the mode-converted exit light.

[0020] Wherein, the mode conversion waveguide 2 includes an input conversion waveguide 21, an intermediate conversion waveguide 22 and an output conversion waveguide 23, the initial end of the input conversion wavegu...

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Abstract

The invention discloses a polarization rotator based on an asymmetric vertical slot waveguide, which comprises an incident end waveguide used for leading in external incident light, a mode conversion waveguide used for converting TE / TM (Transverse Electric / Transverse Magnetic) mode incident light into TM / TE (Transverse Magnetic / Transverse Electric) mode emergent light, and an emergent end waveguide used for leading out a TM / TE mode, wherein the incident end waveguide, the mode conversion waveguide and the emergent end waveguide are asymmetric slot waveguides. With the adoption of the structure, the symmetry of a material is broken longitudinally, and the symmetry of a geometrical dimension is broken transversely, so that intrinsic modes of specific waveguides are mixed modes; the two intrinsic mixed modes can be converted mutually; and mutual conversion between a TE mode and a TM mode can be achieved finally. The polarization rotator can convert a TE / TM mode into the TM / TE mode by once etching, so that the manufacturing difficulty of a device is reduced greatly.

Description

technical field [0001] The invention relates to the technical field of integrated optics, in particular to a polarization rotator based on an asymmetric vertical slot waveguide, which is used to convert a first-order TE / TM mode in the waveguide into a first-order TM / TE mode. Background technique [0002] In the waveguide, the interconversion between the modes will lead to the broadening of the incident light pulse and increase the transmission loss. Therefore, single-mode waveguides are currently used in on-chip interconnect devices. The SOI single-mode waveguide is generally on the submicron scale, and its typical size is 400nm×220nm. Due to its small size and high refractive index difference, the effective refractive index of the TE mode and the TM mode in the waveguide differ greatly, resulting in Polarization mode dispersion, loss and sensitivity to wavelength limit the application of waveguides in communication, so it is necessary to find effective ways to eliminate or ...

Claims

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Application Information

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IPC IPC(8): G02B6/122G02B6/126
Inventor 费永浩陈少武
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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