Standard plane type ultra-precise direct-drive hydrostatic spindle dynamic property on-line testing method
A technology of hydrostatic spindle and dynamic performance, which is used in the testing of mechanical parts, the testing of machine/structural parts, and measuring devices, etc., can solve the problem of inability to realize the online test of dynamic performance of ultra-precision hydrostatic spindle, and achieve accurate measurement results. Reliable, high measurement accuracy, simple and easy to implement
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specific Embodiment approach 1
[0008] Specific implementation mode one: combine figure 1 Describe this embodiment, the online testing method described in this embodiment is based on including vertical ultra-precision direct drive hydrostatic spindle system, measurement system and computer data acquisition and processing system 22 to realize;
[0009] The vertical ultra-precision direct-drive hydrostatic spindle system includes a servo motor, an ultra-precision direct-drive hydrostatic spindle (rotating part, namely the rotor part), a machine tool beam support plate (machine tool beam cover plate) 11, a spindle bushing 14 (stator Part), machine beam 16, micro-feed tool holder 17 and diamond tool 18; the ultra-precision direct-drive static pressure spindle consists of an input end component 10, an upper thrust plate 12, and a shaft center 13 coaxially arranged from top to bottom , the lower thrust plate 15 is fixedly connected; the servo motor includes a motor stator 7, a motor rotor 9 and a casing 8; the mea...
specific Embodiment approach 2
[0012] Specific implementation mode two: combination figure 1 To illustrate this embodiment, the standard plane 2 of this embodiment is an optical flat crystal, the PV value of the surface shape accuracy is better than λ / 20 (where λ=0.633 μm), and the RMS value of the surface roughness is better than 2nm. Other compositions and connections are the same as in the first embodiment.
specific Embodiment approach 3
[0013] Specific implementation mode three: combination figure 1 The present embodiment is described. The surface of the high-precision standard plane 2 in this embodiment is coated with a metal film, and the plated metal is gold, silver, copper or nickel. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 2.
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