Standard plane type ultra-precise direct-drive hydrostatic spindle dynamic property on-line testing method

A technology of hydrostatic spindle and dynamic performance, which is used in the testing of mechanical parts, the testing of machine/structural parts, and measuring devices, etc., can solve the problem of inability to realize the online test of dynamic performance of ultra-precision hydrostatic spindle, and achieve accurate measurement results. Reliable, high measurement accuracy, simple and easy to implement

Active Publication Date: 2013-10-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing method cannot realize the online testing of the dynamic performance of the ultra-precision static pressure spindle, and provides an online testing method for the dynamic performance of the ultra-precision direct-drive static pressure spindle

Method used

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  • Standard plane type ultra-precise direct-drive hydrostatic spindle dynamic property on-line testing method

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specific Embodiment approach 1

[0008] Specific implementation mode one: combine figure 1 Describe this embodiment, the online testing method described in this embodiment is based on including vertical ultra-precision direct drive hydrostatic spindle system, measurement system and computer data acquisition and processing system 22 to realize;

[0009] The vertical ultra-precision direct-drive hydrostatic spindle system includes a servo motor, an ultra-precision direct-drive hydrostatic spindle (rotating part, namely the rotor part), a machine tool beam support plate (machine tool beam cover plate) 11, a spindle bushing 14 (stator Part), machine beam 16, micro-feed tool holder 17 and diamond tool 18; the ultra-precision direct-drive static pressure spindle consists of an input end component 10, an upper thrust plate 12, and a shaft center 13 coaxially arranged from top to bottom , the lower thrust plate 15 is fixedly connected; the servo motor includes a motor stator 7, a motor rotor 9 and a casing 8; the mea...

specific Embodiment approach 2

[0012] Specific implementation mode two: combination figure 1 To illustrate this embodiment, the standard plane 2 of this embodiment is an optical flat crystal, the PV value of the surface shape accuracy is better than λ / 20 (where λ=0.633 μm), and the RMS value of the surface roughness is better than 2nm. Other compositions and connections are the same as in the first embodiment.

specific Embodiment approach 3

[0013] Specific implementation mode three: combination figure 1 The present embodiment is described. The surface of the high-precision standard plane 2 in this embodiment is coated with a metal film, and the plated metal is gold, silver, copper or nickel. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 2.

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Abstract

The invention relates to the field of testing of hydrostatic spindle properties, in particular to a standard plane type ultra-precise direct-drive hydrostatic spindle dynamic property on-line testing method. The method solves the problem that an existing method cannot achieve on-line testing of the dynamic properties of an ultra-precise direct-drive hydrostatic spindle. The method comprises the steps that a high-precision standard plane is installed on the upper end portion of a rotor of the direct-drive ultra-precise hydrostatic spindle and serves as a measurement standard, a high-precision displacement sensor is adopted to measure the displacement changes between the standard plane and the high-precision displacement sensor when the spindle rotates, through the signal amplification of the sensor and a data collecting system, the measured displacement variable quantity is converted into digital signals, then the digital signals are fed into a computer to be analyzed and processed, and therefore the on-line measurement of the ultra-precise direct-drive hydrostatic spindle dynamic properties is achieved. The method can achieve the real-time and on-line measurement of the dynamic properties of the ultra-precise direct-drive hydrostatic spindle under the actual machining condition, and the machining process of an ultra-precise machine tool is not affected.

Description

technical field [0001] The invention relates to a method for testing the dynamic performance of an ultra-precision static pressure spindle, and relates to the field of performance testing of a static pressure spindle. Background technique [0002] With the rapid development of modern science and technology, especially cutting-edge science and technology such as aviation, aerospace, national defense, and military industry, these industries have higher and higher requirements for product stability and performance. It is necessary to improve the surface of product parts and components. Quality and manufacturing precision. Ultra-precision machining machine tools are the core and key in the field of ultra-precision machining. The ultra-precision spindle is the core component of the ultra-precision machine tool. The dynamic performance of the ultra-precision spindle directly affects the surface quality and manufacturing accuracy of the machined parts. How to realize the online me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M13/00
Inventor 张勇付鹏强张飞虎梁迎春张强张龙江
Owner HARBIN INST OF TECH
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