Static pressure main shaft movement precision on-line test method based on laser dynamic interferometer

Abstract

The invention discloses a static pressure main shaft movement precision on-line test method based on a laser dynamic interferometer. A high-precision standard planar crystal is installed on an upper end surface of a direct-driven ultra-precision static pressure main shaft rotor and employed as a measuring reference. The high-precision standard planar crystal revolves along with the main shaft rotor and reflects a real revolution state of a main shaft. By utilization of the characteristic that a laser dynamic interferometer is not sensitive to vibration, the three-dimensional image of the surface of the high-precision standard planar crystal at the end part when the main shaft rotor revolves is obtained in real time, then the image collected by the dynamic interferometer is transmitted to a computer, image analysis and processing are carried out, movement error evaluation is carried out, and therefore on-line measurement of main shaft movement precision is achieved. The on-line test method can achieve real-time on-line measurement of dynamic performances of an ultra-precision static pressure main shaft rotor in a real processing state, a machining process of an ultra-precision machine tool is not affected, and the generation mechanism of the main shaft revolution movement rule during the machine tool cutting process can be reflected.

Description

technical field [0001] The invention relates to the technical field of performance testing of a static pressure spindle, in particular to an online testing method for the motion accuracy of a static pressure spindle based on a laser dynamic interferometer. Background technique [0002] With the rapid development of modern science and technology, especially the rapid advancement of cutting-edge science and technology such as aviation, aerospace, national defense, and military industry, the requirements for product stability and performance are getting higher and higher. It is necessary to improve the surface quality and quality of product parts. Manufacturing precision. Ultra-precision machining machine tools are the core and key in the field of ultra-precision machining. The ultra-precision spindle is the core component of the ultra-precision machine tool. The dynamic performance of the ultra-precision spindle directly affects the surface quality and manufacturing accuracy o...

AI Technical Summary

Problems solved by technology

In the prior art, there are methods of static testing and dynamic testing to measure the performance of the ultra-precision spindle. The static testing method cannot reflect the real state and dynamic performance of the ultra-precision spindle in the actual working process; the current dynamic testing method is susceptible to experimental Environmental interference, such as magnetic interference, machine tool vibration, etc., resulting in inaccurate test results

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