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On-line testing method of hydrostatic spindle motion accuracy based on laser dynamic interferometer

A technology of dynamic interference and static pressure spindle, which is applied in the testing of mechanical components, testing of machine/structural components, instruments, etc., can solve the problems of low accuracy of results, failure to reflect the real state and dynamic performance of ultra-precision spindles, etc. Achieve accurate and reliable measurement results, simple and easy method, and high measurement accuracy

Inactive Publication Date: 2018-01-23
HARBIN UNIV OF SCI & TECH
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Problems solved by technology

In the prior art, there are methods of static testing and dynamic testing to measure the performance of the ultra-precision spindle. The static testing method cannot reflect the real state and dynamic performance of the ultra-precision spindle in the actual working process; the current dynamic testing method is susceptible to experimental Environmental interference, such as magnetic interference, machine tool vibration, etc., resulting in inaccurate test results

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  • On-line testing method of hydrostatic spindle motion accuracy based on laser dynamic interferometer

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specific Embodiment approach 2

[0029] combine figure 1 Describe this embodiment, the laser dynamic interferometer 1 of this embodiment is a Tieman Green type laser interferometer that is not sensitive to vibration, the measurement mode adopts a high-speed optical phase sensor, the acquisition rate is >10 frames / s, and 4000 interferograms / frame , the minimum exposure time is 30μs, the maximum exposure time is 1μs, the RMS repeatability is less than 0.633nm, and the RMS accuracy is less than 1.25nm.

specific Embodiment approach 3

[0030] combine figure 1 To illustrate this embodiment, the high-precision standard flat crystal 2 of this embodiment is an optical flat crystal, the PV value of the surface shape accuracy is less than λ / 50, where λ=0.633 μm, and the RMS value of the surface roughness is less than 2 nm.

specific Embodiment approach 4

[0031]The surface of the high-precision standard flat crystal 2 of this embodiment is coated with a metal film, and the metal is gold, silver, copper or nickel; other compositions and connections are the same as those in Embodiment 2 or 3.

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Abstract

The invention discloses an on-line test method for the motion accuracy of a static pressure spindle based on a laser dynamic interferometer. A high-precision standard flat crystal is installed on the upper end surface of a direct-drive ultra-precision static pressure spindle rotor as a measurement reference, and the high-precision standard flat crystal follows the The spindle rotor rotates together to reflect the actual rotation state of the spindle. Using the characteristic that the laser dynamic interferometer is not sensitive to vibration, the three-dimensional image of the high-precision standard flat crystal surface at the end of the spindle rotor is obtained in real time, and then the dynamic interferometer is collected. The image is transmitted to the computer for image analysis and processing, and motion error evaluation, so as to realize the online measurement of the spindle motion accuracy. The invention can realize real-time on-line measurement of the dynamic performance of the ultra-precision hydrostatic spindle rotor in the actual processing state, does not affect the processing process of the ultra-precision machine tool, and can reflect the generation mechanism of the law of spindle rotation during the cutting process of the machine tool.

Description

technical field [0001] The invention relates to the technical field of performance testing of a static pressure spindle, in particular to an online testing method for the motion accuracy of a static pressure spindle based on a laser dynamic interferometer. Background technique [0002] With the rapid development of modern science and technology, especially the rapid advancement of cutting-edge science and technology such as aviation, aerospace, national defense, and military industry, the requirements for product stability and performance are getting higher and higher. It is necessary to improve the surface quality and quality of product parts. Manufacturing precision. Ultra-precision machining machine tools are the core and key in the field of ultra-precision machining. The ultra-precision spindle is the core component of the ultra-precision machine tool. The dynamic performance of the ultra-precision spindle directly affects the surface quality and manufacturing accuracy o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M13/00
Inventor 付鹏强张德伟葛江华张飞虎张龙江任博远张强
Owner HARBIN UNIV OF SCI & TECH
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