M
A technology of fixing rings and sheets, applied in the field of fixing rings, can solve the problems of not being able to know the damage of the fixing rings in time, economic loss, and wafer breakage.
Active Publication Date: 2015-12-23
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The present invention provides a fixed ring to solve the problem that the damage of the existing fixed ring cannot be known in time, resulting in economic loss caused by wafer damage
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0013] In order to describe the technical solution of the above invention in more detail, specific examples are listed below to demonstrate the technical effect; it should be emphasized that these examples are used to illustrate the present invention and not limit the scope of the present invention.
[0014] The fixed ring provided by the present invention, such as figure 2 As shown, it includes a sheet-shaped ring 10, and also includes a wire 20, a pulse current signal sensor 30 and an alarm device 40. The wire 20 is arranged inside the sheet-shaped ring 10, and the two ends of the wire 20 are respectively connected to the The input end of the pulse current signal sensor 30 is connected, and the output end of the pulse current signal sensor 30 is connected to the alarm device 40 . The present invention embeds the wire 20 inside the sheet-shaped ring 10, and connects the two ends of the wire 20 to the input end of the pulse current signal sensor 30. When the sheet-shaped ring...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a fixed ring, which comprises a sheet ring, a lead, a pulse current signal sensor and an alarm device, wherein the lead is arranged inside the sheet ring, the two ends of the lead are connected with the input end of the pulse current signal sensor respectively, and the output end of the pulse current signal sensor is connected to the alarm device. According to the invention, the lead is embedded in the sheet ring, and the two ends of the lead are connected to the input end of the pulse current signal sensor, so that when the sheet ring is intact, the pulse current signal sensor can receive a normal pulse current signal due to the communication function of the lead and the fixed ring works normally; when the sheet ring is damaged, the communication of the lead is switched off, the pulse current signal sensor cannot receive the normal signal and outputs an alarm signal to the alarm device, and the alarm device alarms to remind the operating personnel of damage and timely replacement of the fixed ring; therefore, the potential risk and the economic loss caused by damage of the fixed ring can be efficiently reduced.
Description
technical field [0001] The invention relates to the field of chemical mechanical polishing, in particular to a fixed ring capable of automatic alarm. Background technique [0002] With the development of semiconductor manufacturing technology, while the critical dimensions of integrated circuits are getting smaller and smaller, the size of wafers is getting bigger and bigger, and the value of single wafers is getting higher and higher. Therefore, in the process of wafer processing Once fragmentation occurs, the economic loss brought to the factory is also increasing. There are many factors that cause wafer fragmentation during processing. Among them, the fracture of the fixed ring on the polishing head during the polishing process is one of the factors that cause wafer fragmentation. If the fracture of the fixed ring cannot be detected in time and Stopping the operation of the polishing machine will not only cause wafer fragmentation, but may even cause serious damage to ot...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/34
Inventor 李虎张守龙白英英陈玉文
Owner SHANGHAI HUALI MICROELECTRONICS CORP