mems microphone and its working control method

Abstract

The invention discloses an MEMS (micro electro mechanical system) microphone, which comprises an MEMS chip and an ASIC (application specific integrated circuit) chip, wherein the MEMS chip and the ASIC chip are electrically connected, the MEMS chip is provided with a first vibration film, a second vibration film and a back plate, the back plate is arranged between the first vibration film and the second vibration film, the first vibration film and the second vibration film are respectively in separated arrangement with the back plate for forming capacitance structures C1 and C2, the capacitance structures C1 and C2 are in parallel connection arrangement, and the ASIC chip controls the work of the MEMS chip for selecting different output signal output of the MEMS chip. The MEMS microphone provided by the invention simultaneously realizes high sensitivity and high sound pressure level.

Description

【Technical field】 [0001] The invention relates to the field of microphones, in particular to a MEMS microphone. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important, and the microphone of a mobile phone is used as a voice pick-up device of the mobile phone, and its performance directly affects the call quality. [0003] At present, MEMS microphones are widely used. In order to achieve superior voice pickup performance, MEMS microphones are required to have high sensitivity and high sound pressure level at the same time, but the problem now is to improve sensitivity and sound pressure level. For a diaphragm structure, it is contradictory, t...

AI Technical Summary

Problems solved by technology

[0003] At present, MEMS microphones are widely used. In order to achieve superior voice pickup performance, MEMS microphones are required to have high sensitivity and high sound pressure level at the same time, but the problem now is to improve sensitivity and sound pressure level. In terms of a diaphragm structure, it is contradictory, that is, to increase the sensitivity, the sound pressure level will be sacrificed, and to increase the sound pressure level, the sensitivity will be sacrificed.

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