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Method and device for coating substrates

A technology for substrates and equipment, applied in the field of coating glass substrates used to manufacture solar cells, which can solve problems such as inapplicability of larger widths

Active Publication Date: 2013-11-27
CTF SOLAR GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Greater widths are not applicable in relation to the use of usual soda-lime glass

Method used

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  • Method and device for coating substrates
  • Method and device for coating substrates
  • Method and device for coating substrates

Examples

Experimental program
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Embodiment Construction

[0069] An exemplary apparatus is described below, which is suitable for carrying out the method according to the invention. In the figures, reference numerals refer to corresponding elements.

[0070] A first heating chamber ( 3 ), a coating chamber ( 2 ) and a second heating chamber ( 3 ) are arranged one behind the other.

[0071]A plate-shaped substrate (1) made of soda lime glass and having a phase transition temperature of 550° C. was used. In a previous working step, the underside of the substrate ( 1 ) was already coated with a TCO layer as the front electrode. The width of the substrate ( 1 ) in the transport direction at 25° C. was 1200 mm. The length of the substrate (1) is 1600mm (at 25°C). The edges of the base material are rounded by C-type grinding. The substrate (1) enters the first heating chamber (3) at a temperature of 480°C. The substrate moves on a transport system (30). The transport system ( 30 ) consists of a shaft ( 31 ) with outer rollers ( 313 )...

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Abstract

The invention relates to a method and device for coating plate-shaped substrates, in particular glass substrates for solar cell production. The method includes heating the substrates, which are moved on transporting shafts through heating and coating chambers, by a different amount on the upper and lower sides, so that the coating temperature can be increased without the substrates becoming too soft to handle. A device is described which is suitable for carrying out the method and has heating and coating chambers, which have independent heating systems, as well as a transport system.

Description

technical field [0001] The invention relates to a method and an apparatus for coating sheet-like substrates, in particular glass substrates for the production of solar cells. Background technique [0002] Solar cells play a decisive role in future energy production. In particular thin-film solar cells are advantageous here with regard to the low material consumption and their suitability for mass production. As an alternative to silicon-based solar cells, thin-film solar cells based on cadmium telluride (CdTe) are in particular provided. CdTe has an energy gap of 1.45eV and is therefore well suited for absorbing sunlight. Accordingly, high efficiencies can be achieved by CdTe thin-film solar cells. Usually CdTe is used together with cadmium sulfide (CdS) as a layer structure in order to make the necessary pn junction, which consists of a double layer p-CdTe-n-CdS. Here, the CdS somehow acts as a window and absorbs only a small fraction of the visible light, while the res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/56
CPCH01L21/02557H01L21/6776H01L21/02617Y02E10/543H01L31/1876C23C14/568H01L21/67109C03C17/09H01L21/02568H01L21/67706H01L31/1828C03C17/002H01L21/02562C23C14/56H01L21/02422C23C14/541C03C17/245C03C17/3476C03C2218/15C23C14/0629C23C14/24C23C14/562C23C14/566Y02P70/50C23C14/54C23C16/46H01L31/18H01L31/1892
Inventor 迈克尔·哈里希尔马·里希特斯特芬·博瑟尔特拉尔夫·施托伊滕斯特芬·乔治塞巴斯蒂安·蒂特尔维尔纳·沙德
Owner CTF SOLAR GMBH