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Method and apparatus for coating a substrate

A technology for substrates and equipment, applied in the field of coating glass substrates used to manufacture solar cells, can solve problems such as inapplicability of larger widths

Active Publication Date: 2016-05-11
CTF SOLAR GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Greater widths are not applicable in relation to the use of usual soda-lime glass

Method used

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  • Method and apparatus for coating a substrate
  • Method and apparatus for coating a substrate
  • Method and apparatus for coating a substrate

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Embodiment Construction

[0071] An exemplary apparatus is described below, which is suitable for carrying out the method according to the invention. In the figures, reference numerals refer to corresponding elements.

[0072] The first heating chamber (3), the coating chamber (2) and the second heating chamber (3) are arranged one after the other.

[0073] A plate-shaped substrate (1) made of soda lime glass and having a phase transition temperature of 550° C. was used. In a previous working step, the underside of the substrate ( 1 ) was already coated with a TCO layer as front electrode. The substrate (1) had a width of 1200 mm in the transport direction at 25°C. The length of the substrate (1) is 1600 mm (at 25° C.). The edges of the base material are rounded by C-type grinding. The substrate (1) enters the first heating chamber (3) at a temperature of 480°C. The substrate moves on a transport system (30). The transport system (30) consists of a shaft (31) with outer rollers (313) with incline...

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Abstract

The invention describes a method and an apparatus for coating sheet-like substrates, in particular glass substrates for the production of solar cells. The method consists in that the substrate, which is moved on a transport axis through the heating and coating chambers, is heated with different intensities on the top side and the bottom side, so that the coating temperature can be increased without the substrate softening any longer Machinable. An apparatus is described, which is suitable for carrying out the method, and the heating chamber and the coating chamber have separate heating systems and transport systems.

Description

technical field [0001] The invention relates to a method and an apparatus for coating sheet-like substrates, in particular glass substrates for the production of solar cells. Background technique [0002] Solar cells play a decisive role in future energy production. In particular thin-film solar cells are advantageous here with regard to the low material consumption and their suitability for mass production. As an alternative to silicon-based solar cells, thin-film solar cells based on cadmium telluride (CdTe) are in particular provided. CdTe has an energy gap of 1.45eV and is therefore well suited for absorbing sunlight. Accordingly, high efficiencies can be achieved by CdTe thin-film solar cells. Usually CdTe is used together with cadmium sulfide (CdS) as a layer structure in order to produce the necessary pn junction, which consists of a double layer p-CdTe-n-CdS. Here, the CdS somehow acts as a window and absorbs only a small fraction of the visible light, while the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/54C23C14/56
CPCC03C17/002C03C17/09C23C14/541C23C14/56C23C14/568H01L21/02422H01L21/02557H01L21/02562H01L21/02568H01L21/02617H01L21/67109H01L21/67706H01L21/6776H01L31/1828H01L31/1876Y02E10/543C03C17/245C03C17/3476C03C2218/15C23C14/0629C23C14/24C23C14/562C23C14/566Y02P70/50C23C14/54C23C16/46H01L31/18H01L31/1892
Inventor 迈克尔·哈里希尔马·里希特斯特芬·博瑟尔特拉尔夫·施托伊滕斯特芬·乔治塞巴斯蒂安·蒂特尔维尔纳·沙德
Owner CTF SOLAR GMBH