Sapphire furnace dual-bellow weighing system
A technology of double bellows and weighing system, which is applied in the direction of crystal growth, single crystal growth, chemical instruments and methods, etc., and can solve problems such as failure, bellows interference, automatic control, etc.
Inactive Publication Date: 2013-12-04
XIAN CHUANGLIAN NEW ENERGY EQUIP
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Problems solved by technology
At present, the weighing structure of the KY method sapphire furnace starts from the crystal growth, and the interference caused by the stretching of the bellows has caused great difficulties in judging the actual weight of the crystal in real time, so that precise automatic control cannot be performed.
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[0013] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0014] As shown in the accompanying drawings, a sapphire furnace double bellows weighing system of the present invention includes a vacuum chamber 8, a seed crystal shaft 7 placed in the vacuum chamber 8 at the bottom, and a seed shaft seat fixed on the top of the seed shaft 7 1. There is a rotary sealing device in the seed crystal shaft seat 1, a lower bellows 6 is fixed on the top of the vacuum chamber 8, and a sliding seat 4 is fixed on the top of the lower bellows 6. The sliding seat 4 is hollow, and the sliding seat 4. An upper bellows 5 is fixed at the upper and lower corresponding positions of the inner bottom and the lower bellows 6. The top of the upper bellows 5 is connected to the bottom of the seed crystal shaft seat 1, and a scale is fixed on the top of the slide seat 4 at both ends of the seed crystal shaft seat 1. A loa...
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A sapphire furnace dual-bellow weighing system comprises a vacuum chamber and a seed shaft; the bottom of the seed shaft is arranged in the vacuum chamber, a seed shaft holder is arranged at the top of the seed shaft, a lower bellow is fixed at the top of the vacuum chamber, a hollow sliding seat is fixed at the top of the lower bellow, an upper bellow is fixed at a position, vertically corresponding to the lower bellow, at the bottom inside the sliding seat, the top of the upper bellow is connected to the bottom of the seed shaft holder, a weighting sensor is fixed at the top of the sliding seat, a weighting connect plate is perpendicularly mounted at the input end of the weighting sensor, and the seed shaft holder is fixed on the weighting connect plate. When the sliding seat drives the seed shaft to lift, the lower bellow is drawn and compressed to deform, disturbance force produced by the lower bellow is beard by the sliding seat, and the weighting sensor is free of affection; when the weight of crystal increases, micro-deformation produced by the weighting sensor due to measurement is counteracted by deformation of the upper bellow, the deformation of the upper bellow is small, weight influence resulted from deformation is negligible, so that highly-accurate measurement can be achieved.
Description
technical field [0001] The invention relates to the technical field of double bellows of sapphire furnace, in particular to a weighing system of double bellows of sapphire furnace. Background technique [0002] During the KY method sapphire furnace crystal growth process, the measurement of weight is very important. The entire crystal growth process is controlled around the weight. Real-time and accurate weight measurement basically determines the final quality of the crystal. At present, the weighing structure of the KY method sapphire furnace starts from the crystal growth, and the interference caused by the stretching of the bellows creates great difficulties in judging the actual weight of the crystal in real time, so that precise automatic control cannot be performed. Contents of the invention [0003] In order to solve the above-mentioned problems in the prior art, the object of the present invention is to provide a double bellows weighing system for sapphire furnace...
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IPC IPC(8): C30B15/20
Inventor 武海军刘统青时刚
Owner XIAN CHUANGLIAN NEW ENERGY EQUIP