Exhaust gas heating apparatus

Abstract

The invention provides a compact exhaust gas heating apparatus without needing large arrangement space. The exhaust gas heating apparatus (14) is used for heating the exhaust gas containing unreacted treated gas discharged from a treating container of a treating device, and comprises: a heating container (20) for heating the exhaust gas; an internal wall (22) for dividing the heating container to be a central first gas flow space (31) and a second gas flow space (32), wherein the second gas flow space (32) facing to the external circumferential wall and surrounds the first gas flow space (31); a gas introducing part (23) for introducing the exhaust gas to the first gas flow space (31); a gas discharging part (25) for discharging the exhaust gas from the second gas flow space (32); and a heater (26) which is arranged in the first gas flow space for heating the exhaust gas flowing in the first gas flow space.

Description

technical field [0001] The present invention relates to an exhaust gas heating device that heats exhaust gas discharged from a treatment device to make it harmless. Background technique [0002] Many gas processing devices use organic Harmful gases such as metal (MO) gas, ozone gas, and silane-based gases cannot be discharged into the environment without reacting, so exhaust heating is used to heat the exhaust gas on the exhaust piping. The device thermally decomposes the exhaust gas to make the exhaust gas harmless. [0003] As such an exhaust heating device, there is known a jacket type exhaust heating device in which a heater is arranged outside the exhaust pipe. In addition, there are also known exhaust heating devices in which a heater is arranged in an exhaust flow path (for example, Patent Documents 1 and 2). [0004] Patent Document 1: Japanese Patent Laid-Open No. 2001-355823 [0005] Patent Document 2: Japanese Patent Laid-Open No. 2004-162963 [0006] Usually...

AI Technical Summary

Problems solved by technology

In addition, when such high-temperature exhaust gas flows into the vacuum pump, the vacuum pump may be damaged, so a mechanism for cooling the exhaust gas, such as extending the piping from the exhaust heating device to the vacuum pump, is required.

Such an exhaust gas heater requires a large installation space due to the insulation and cooling required in this way

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