Classification method for film defects
A classification method and a technology for thin film defects, which are applied in the direction of optical testing for flaws/defects, etc., can solve the problems of low detection efficiency, manpower and material resources, etc., and achieve the effects of improving accuracy, eliminating interference, and saving detection time
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[0040] The film defect classification method includes an image preprocessing part and a detection part. The image preprocessing part includes (1) extracting a target area and (2) eliminating false boundaries; the detection part includes (3) defect classification detection.
[0041] Below in conjunction with accompanying drawing, these two parts are described:
[0042] Such as figure 1 shown
[0043] (1) Extract the target area
[0044] In addition to the complete product image, the image to be inspected by the high-speed linear array CCD camera also contains background areas with high-brightness grayscale features on both sides, such as figure 2 As shown, the white background area on both sides. According to the gray features of the background and foreground, an appropriate global threshold is selected to separate the background and obtain the target image. Since the gray feature of the perforated area is consistent with the background, the perforated area is also elimina...
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