Classification method for film defects
A classification method and a technology for thin film defects, which are applied in the direction of optical testing for flaws/defects, etc., can solve the problems of low detection efficiency, manpower and material resources, etc., and achieve the effects of improving accuracy, eliminating interference, and saving detection time
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[0040] The thin film defect classification method includes an image preprocessing part and a detection part. The image preprocessing part includes (1) extracting the target area and (2) eliminating false boundaries; the detection part includes (3) defect classification detection.
[0041] The two parts are described below in conjunction with the drawings:
[0042] Such as figure 1 Shown
[0043] (1) Extract the target area
[0044] In addition to the complete product image, the image to be inspected captured by the high-speed linear CCD camera also contains background areas with high brightness and gray features on both sides, such as figure 2 As shown, there are white background areas on both sides. According to the gray characteristics of the background and the foreground, an appropriate global threshold is selected to separate the background to obtain the target image. Since the gray-scale feature of the perforated area is consistent with the background, the perforated area is al...
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